[Fwd: Re: Comment epi SNF 2007-11-02 08:42:08: HCl update]

maurice stevens maurice at stanford.edu
Fri Nov 2 14:47:17 PDT 2007



-------- Original Message --------
Subject: 	Re: Comment epi SNF 2007-11-02 08:42:08: HCl update
Date: 	Fri, 2 Nov 2007 14:27:34 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi-pcs at snf.stanford.edu



Installed new HCl panel and purge.  HCl is now back on.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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