[Fwd: Re: Comment epi SNF 2007-11-02 08:42:08: HCl update]
maurice stevens
maurice at stanford.edu
Fri Nov 2 14:47:17 PDT 2007
-------- Original Message --------
Subject: Re: Comment epi SNF 2007-11-02 08:42:08: HCl update
Date: Fri, 2 Nov 2007 14:27:34 -0700
From: eenriquez at snf.stanford.edu
To: epi-pcs at snf.stanford.edu
Installed new HCl panel and purge. HCl is now back on.
--
maurice at stanford.edu
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278
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