Fwd: Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure

maurice at stanford.edu maurice at stanford.edu
Fri Nov 9 15:23:15 PST 2007



----- Forwarded message from maurice at snf.stanford.edu -----
     Date: Fri, 9 Nov 2007 15:19:47 -0800
     From: maurice at snf.stanford.edu
Reply-To: maurice at snf.stanford.edu
  Subject: Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure
       To: epi2-pcs at snf.stanford.edu

After running the third wafer (all the same recipe) the reactor  
shutdown in the middle of the 4th deposition.
Vaccum pump over pressure or over temp
Hazard warning EXH at ATM
Foreline pressure greater than ATM



----- End forwarded message -----




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