Fwd: Shutdown epi2 SNF 2007-11-21 11:19:37: Pinhole in the susceptor

maurice at stanford.edu maurice at stanford.edu
Wed Nov 21 11:23:15 PST 2007



----- Forwarded message from maurice at snf.stanford.edu -----
     Date: Wed, 21 Nov 2007 11:19:37 -0800
     From: maurice at snf.stanford.edu
Reply-To: maurice at snf.stanford.edu
  Subject: Shutdown epi2 SNF 2007-11-21 11:19:37: Pinhole in the susceptor
       To: epi2-pcs at snf.stanford.edu

One user is finding haze on his Ge depositions.  We inspected the dome  
and found it has light  haze on it.  We also found a spot on the  
susceptor that looks like a pinhole.
A pinhole pan cause haze and cross contamination.



----- End forwarded message -----




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