status 11/28/07

maurice stevens maurice at
Wed Nov 28 18:04:06 PST 2007

Elmer has new susceptor and the cleaned doom in place. 

We have run a few runs that are coming out with haze.  Each run looks a 
little better than the previous.  The base is a little high.  We expect 
1.0 torr but we are only reaching 1.52torr.  The haze and the high base 
are not unusual for a system that has been at atm for a couple of days.

We will continue to bake the system and run wafers to get rid of the 
haze/ high base.

maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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