epi2 update 11/29/07

maurice stevens maurice at stanford.edu
Thu Nov 29 10:49:41 PST 2007

On our fifth haze test wafer it appears that one of the three wafer lift pin stuck (jammed, got bound, got stuck, ...didn't lift).  This broke one of the three legs of the pin lifter.  It also tilted the susceptor and caused the wafer blade to break.
We are checking our inventory for spare parts and investigating having some parts fire polished so the don't bind.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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