From garyyamanet at aim.com Mon Oct 1 08:08:06 2007 From: garyyamanet at aim.com (garyyamanet at aim.com) Date: Mon, 01 Oct 2007 11:08:06 -0400 Subject: finished epi2 early, available today from 8:30a, sorry for the late notice. Message-ID: <8C9D254015A106E-1290-5A7C@webmail-db09.sysops.aol.com> ________________________________________________________________________ Check Out the new free AIM(R) Mail -- Unlimited storage and industry-leading spam and email virus protection. -------------- next part -------------- An HTML attachment was scrubbed... URL: From masaharu at stanford.edu Mon Oct 1 20:48:22 2007 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Mon, 01 Oct 2007 20:48:22 -0700 Subject: release: 20:30-23:00 today Message-ID: <20071001204822.butfn7tn8k444s4o@webmail.stanford.edu> Hi all, I am sorry for the late notice. Masaharu From rshyam at stanford.edu Mon Oct 1 23:36:29 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Mon, 1 Oct 2007 23:36:29 -0700 Subject: epi2 free until 8 am Message-ID: my apologies for the late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmelamud at stanford.edu Tue Oct 2 08:14:57 2007 From: rmelamud at stanford.edu (Renata Melamud) Date: Tue, 02 Oct 2007 08:14:57 -0700 Subject: epi2 free today Message-ID: <47026071.1040603@stanford.edu> sorry, thought we would have some more wafers ready by today. Renata From syoneoka at gmail.com Wed Oct 3 14:12:51 2007 From: syoneoka at gmail.com (Shingo Yoneoka) Date: Wed, 3 Oct 2007 14:12:51 -0700 Subject: epi2 reservation was released during 2-5pm Message-ID: Sorry for the late notice. I release the reservation from 2:00-5:00pm today. Shingo From masaharu at stanford.edu Wed Oct 3 18:13:52 2007 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Wed, 03 Oct 2007 18:13:52 -0700 Subject: epi2 free 4:00am-8:00am Message-ID: <20071003181352.y0ztigop6sc0oc8k@webmail.stanford.edu> Hi all, Sorry for the late notice. Masaharu From rshyam at stanford.edu Wed Oct 3 20:03:31 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Wed, 3 Oct 2007 20:03:31 -0700 Subject: Reservation released until 4 am : epi2 problem Message-ID: No DCS flow - see coral -------------- next part -------------- An HTML attachment was scrubbed... URL: From donghun.choi at stanford.edu Thu Oct 4 08:36:04 2007 From: donghun.choi at stanford.edu (Donghun Choi) Date: Thu, 4 Oct 2007 08:36:04 -0700 Subject: Reservation released ( 2 : 00 ~ 7:00 pm) today References: Message-ID: <018601c8069c$46b68250$0100000a@challenger> sorry for late notice ------------------------------------------------------------------------------------------------------------- Donghun Choi Ph.D Candidate Dep. of Electrical Engineering Center for Integrated Systerms Prof. James S. Harris group 420 Via Ortega, CIS-X Rm 126x Solid State & Photonics Lab Stanford, CA 94305 Ph: (650) 725-8313 Fax : (650) 723-4659 E-Mail:donghun.choi at stanford.edu http://snowboard.stanford.edu/~dhchoi -------------------------------------------------------------------------------------------------------------- ----- Original Message ----- From: Shyam Raghunathan To: epi2 at snf.stanford.edu Sent: Wednesday, October 03, 2007 8:03 PM Subject: Reservation released until 4 am : epi2 problem No DCS flow - see coral -------------- next part -------------- An HTML attachment was scrubbed... URL: From syoneoka at gmail.com Thu Oct 4 12:31:03 2007 From: syoneoka at gmail.com (Shingo Yoneoka) Date: Thu, 4 Oct 2007 12:31:03 -0700 Subject: Reservation is released 2-7pm today Message-ID: <002BBCD5-F3EA-4B1D-955B-4C8B0081E8AA@stanford.edu> The dopant does not flow. Shingo From maurice at stanford.edu Thu Oct 4 19:48:05 2007 From: maurice at stanford.edu (maurice at stanford.edu) Date: Thu, 04 Oct 2007 19:48:05 -0700 Subject: epi2 dopants working Message-ID: <20071004194805.2oi02znzmsgs8gws@webmail.stanford.edu> Dopant mix backpressure regulators adjusted. D-Dop1, Dop1 and Dop2 all flow to the vent and to the chamber when called for in a recipe. D-Dop2 not working. To verify dopants are working, program "DOP1 FLOW" has been created as a cleaning recipe (put it in place of GE etch or Etch coat-cha). It will: Flow DOP1 to vent for 20 sec Flow DOP1 to chamber A for 20 sec Flow DOP2 to vent for 20 sec Flow DOP2 to chamber A for 20 sec From maurice at stanford.edu Fri Oct 5 11:25:33 2007 From: maurice at stanford.edu (maurice at stanford.edu) Date: Fri, 05 Oct 2007 11:25:33 -0700 Subject: Epi2 Free til 3:30pm today Message-ID: <20071005112533.v21ntlpa80k0wss4@webmail.stanford.edu> Gary finished early with his reservation and so I will notneed mine after lunch. From hweiyin at stanford.edu Sat Oct 6 16:34:28 2007 From: hweiyin at stanford.edu (Serene Koh) Date: Sat, 6 Oct 2007 16:34:28 -0700 Subject: Epi2 reservation cancelled Sunday 2pm to 6pm Message-ID: <8b7d24450710061634w73fa54f5u4ab6d86f7aac4ad5@mail.gmail.com> Sorry for the late notice. From yoneoka at stanford.edu Sat Oct 6 21:12:24 2007 From: yoneoka at stanford.edu (yoneoka at stanford.edu) Date: Sat, 06 Oct 2007 21:12:24 -0700 Subject: Epi2 reservation is released 3:30am-12am on Sunday Message-ID: <20071006211224.p1uyavoiswcoscow@webmail.stanford.edu> Sorry for the late notice. The process finished earlier. From rshyam at stanford.edu Sun Oct 7 09:26:43 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Sun, 7 Oct 2007 09:26:43 -0700 Subject: epi free at 2 pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From masaharu at stanford.edu Sun Oct 7 21:59:59 2007 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Sun, 07 Oct 2007 21:59:59 -0700 Subject: epi2 free 3:00am- Message-ID: <20071007215959.0c4e103up4ow8cks@webmail.stanford.edu> I am sorry for the late notice. epi2 is now free from 3:00am. Masaharu From maurice at stanford.edu Tue Oct 9 16:40:42 2007 From: maurice at stanford.edu (maurice at stanford.edu) Date: Tue, 09 Oct 2007 16:40:42 -0700 Subject: Epi2 Up after lamp failure Message-ID: <20071009164042.7dz38mg5wo4gsg8k@webmail.stanford.edu> System gave a lamp failure error. Reset system. Ran a chamber etch. System seem ok...for now. From mmessana at stanford.edu Tue Oct 9 20:23:40 2007 From: mmessana at stanford.edu (Matthew W. Messana) Date: Tue, 09 Oct 2007 20:23:40 -0700 Subject: epi2 free... Message-ID: <20071009202340.gj8bb2wl0csccw0c@webmail.stanford.edu> All, We stopped our processing becuase our recipe kept aborting. It seemed to be mostly a problem with the n-dopant. See comments on coral. Good luck! Matt From maurice at stanford.edu Thu Oct 11 15:20:06 2007 From: maurice at stanford.edu (maurice stevens) Date: Thu, 11 Oct 2007 15:20:06 -0700 Subject: Epi2 update Message-ID: <470EA196.90007@stanford.edu> The system believes it has a lamp problem (we are not convinced that this is true). It also believe there is a scrubber issue. We now know how to measure the ohms in each heating zone and how to remove the heating lamps. System will be down tonight. Work will continue tomorrow. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From edmyers at stanford.edu Fri Oct 12 19:54:07 2007 From: edmyers at stanford.edu (Ed Myers) Date: Fri, 12 Oct 2007 19:54:07 -0700 Subject: NO Chlorine, 10/12/07. 7:30pm Message-ID: <6.2.5.6.2.20071012195045.01df7e10@stanford.edu> Due to an alarm in the HCl cabinet, the HCl has been turned off for the weekend. We will investigate Monday morning. From maurice at stanford.edu Mon Oct 15 14:19:01 2007 From: maurice at stanford.edu (maurice stevens) Date: Mon, 15 Oct 2007 14:19:01 -0700 Subject: Epi HCl leak Message-ID: <4713D945.7060008@stanford.edu> Friday night there was a leak on the epi HCl gas panel out in the gas bunker (this was in an exhausted cabinet). Both epi systems are without HCl until repairs are made. We will send out an update when we have more info and an estimated time for repair. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Oct 16 15:36:37 2007 From: maurice at stanford.edu (maurice stevens) Date: Tue, 16 Oct 2007 15:36:37 -0700 Subject: HCl update Message-ID: <47153CF5.3000405@stanford.edu> The contractor has started working on the HCl panel repair and if every goes as planned, the HCl will be turned back on Thur afternoon. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed Oct 17 17:38:44 2007 From: maurice at stanford.edu (maurice at stanford.edu) Date: Wed, 17 Oct 2007 17:38:44 -0700 Subject: Epi2 update: system up!! Message-ID: <20071017173844.zelv2mfb400ws0k0@webmail.stanford.edu> HCl:C&C rebuilt venturi on the "good" panel (the other panel will be replaced) Burnbox: Elmer adjust H2 flow, temp is now ok From gunjim at stanford.edu Thu Oct 18 07:42:05 2007 From: gunjim at stanford.edu (Marika Gunji) Date: Thu, 18 Oct 2007 07:42:05 -0700 Subject: Today 12:30-16:30 reservation release Message-ID: <200710181441.l9IEfNUj012080@smtp-roam.Stanford.EDU> I apologize for the late notice. Marika -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Oct 22 11:05:16 2007 From: maurice at stanford.edu (maurice at stanford.edu) Date: Mon, 22 Oct 2007 11:05:16 -0700 Subject: epi2 free 10am-1pm 10/23/07 Message-ID: <20071022110516.fzbza6mo044csck4@webmail.stanford.edu> reservation not needed From maurice at stanford.edu Mon Oct 22 15:48:06 2007 From: maurice at stanford.edu (maurice stevens) Date: Mon, 22 Oct 2007 15:48:06 -0700 Subject: Epi2 workgroup meeting Thursday, 3:00pm in CIS-101 In-Reply-To: <00c401c7c275$3935fc70$aba1f550$@edu> References: <00c401c7c275$3935fc70$aba1f550$@edu> Message-ID: <471D28A6.2040405@stanford.edu> We will discuss how to process Ge grown in epi2 (maybe how to clean Ge grown in epi2 is the real question). 10/ 25 07, Thursday, 3:00pm in CIS-101 All are welcome. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From hweiyin at stanford.edu Mon Oct 22 19:48:56 2007 From: hweiyin at stanford.edu (Serene Koh) Date: Mon, 22 Oct 2007 19:48:56 -0700 Subject: Epi2 reservation cancelled: Tuesday 10am to 1pm Message-ID: <8b7d24450710221948i310f1217r565097e825749d28@mail.gmail.com> Not ready to run more wafers. Sorry for the late notice. From nishiy at stanford.edu Mon Oct 22 21:16:40 2007 From: nishiy at stanford.edu (Yoshio Nishi) Date: Mon, 22 Oct 2007 21:16:40 -0700 Subject: Epi2 workgroup meeting Thursday, 3:00pm in CIS-101 In-Reply-To: <471D28A6.2040405@stanford.edu> Message-ID: <001901c8152b$83e8d3b0$cb1042ab@stanford.edu> Maurice, I will need to excuse from this meeting due to other commitment. Regards, Yoshio Nishi -----Original Message----- From: maurice stevens [mailto:maurice at stanford.edu] Sent: Monday, October 22, 2007 3:48 PM To: epi2 at snf.stanford.edu Cc: Krishna Saraswat; 'Yoshio Nishi'; 'Paul Rissman'; 'Krishna Saraswat'; 'James Harris'; 'Shin-ichi Kobayashi'; eenriquez at snf.stanford.edu; cbaxter at snf.stanford.edu; 'Jim McVittie' Subject: Epi2 workgroup meeting Thursday, 3:00pm in CIS-101 We will discuss how to process Ge grown in epi2 (maybe how to clean Ge grown in epi2 is the real question). 10/ 25 07, Thursday, 3:00pm in CIS-101 All are welcome. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From saraswat at cis.stanford.edu Tue Oct 23 08:30:32 2007 From: saraswat at cis.stanford.edu (Krishna Saraswat) Date: Tue, 23 Oct 2007 08:30:32 -0700 Subject: Epi2 workgroup meeting Thursday, 3:00pm in CIS-101 In-Reply-To: <471D28A6.2040405@stanford.edu> References: <00c401c7c275$3935fc70$aba1f550$@edu> <471D28A6.2040405@stanford.edu> Message-ID: <74E500A5-A62A-4344-A1DA-88F4DB070995@cis.stanford.edu> Maurice, I will be at this meeting. Let us try to establish the cleaning procedure for Ge grown on Si wafers in epi2 and in which equipment these wafers can go. Krishna --------- On Oct 22, 2007, at 3:48 PM, maurice stevens wrote: > We will discuss how to process Ge grown in epi2 (maybe how to clean > Ge grown in epi2 is the real question). > 10/ 25 07, Thursday, 3:00pm in CIS-101 > > All are welcome. > > -- > maurice at stanford.edu > > Maurice Stevens > Stanford Nanofabrication Facility > CIS Room 142, Mail Code 4070 > Stanford, CA 94305 > P. (650)725-3660 > F. (650)725.6278 > From rshyam at stanford.edu Wed Oct 24 05:54:33 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Wed, 24 Oct 2007 05:54:33 -0700 Subject: epi2 reservation removed at 6 am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Oct 24 16:16:11 2007 From: maurice at stanford.edu (maurice stevens) Date: Wed, 24 Oct 2007 16:16:11 -0700 Subject: No HCL until friday Message-ID: <471FD23B.7070307@stanford.edu> Both epi system will be without HCl until Friday. There is a problem with the HCl panel in the gas bunker. The systems can only be used for H2 anneals during this time. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu Oct 25 14:37:19 2007 From: maurice at stanford.edu (maurice at stanford.edu) Date: Thu, 25 Oct 2007 14:37:19 -0700 Subject: Hard drive is full Message-ID: <20071025143719.m2s16l3mmf40kcc4@webmail.stanford.edu> Hey gang, The hard disk on EPI2 is full. If you have recipes on the hard drive that you don't need, please delete them. If you have more recipes on the drive than you have fingers and toes, please removes some. The recipes are easy to create if you have the parameters written down. Our maint guys are working on the floppy and hope to have it up soon. -m From gunjim at stanford.edu Sat Oct 27 18:16:05 2007 From: gunjim at stanford.edu (gunjim at stanford.edu) Date: Sat, 27 Oct 2007 18:16:05 -0700 Subject: Epi2 reservation cleared on Monday morning Message-ID: <20071027181605.uqz4edxp0c4g4www@webmail.stanford.edu> Canceled from 8AM to 1PM. Thank you, Marika From gunjim at stanford.edu Mon Oct 29 15:50:31 2007 From: gunjim at stanford.edu (Marika) Date: Mon, 29 Oct 2007 15:50:31 -0700 Subject: Tuesday evening reservation canceled Message-ID: <200710292250.l9TMoe6C026887@smtp-roam.Stanford.EDU> Due to the characterization equipment down. Sorry for the late notice. Marika -------------- next part -------------- An HTML attachment was scrubbed... URL: