From maurice at stanford.edu Mon Dec 8 10:02:26 2008 From: maurice at stanford.edu (maurice stevens) Date: Mon, 08 Dec 2008 10:02:26 -0800 Subject: [Fwd: Problem epi2 SNF 2008-12-08 06:02:05: Germane] Message-ID: <493D6132.3000901@stanford.edu> We are checking on the delivery date of the ordered bottle. If we can't get that one before Wed. we will take the Ge from TylanSiGe. -------- Original Message -------- Subject: Problem epi2 SNF 2008-12-08 06:02:05: Germane Date: Mon, 8 Dec 2008 06:02:06 -0800 From: mdickey at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Germane is empty. No Germane available at this time -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Mon Dec 8 17:30:59 2008 From: maurice at stanford.edu (maurice stevens) Date: Mon, 08 Dec 2008 17:30:59 -0800 Subject: [Fwd: Comment epi2 SNF 2008-12-08 11:04:01: Germane] Message-ID: <493DCA53.5090704@stanford.edu> -------- Original Message -------- Subject: Comment epi2 SNF 2008-12-08 11:04:01: Germane Date: Mon, 8 Dec 2008 11:04:01 -0800 From: mdickey at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Germane is due in tomorrow -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Dec 9 16:07:03 2008 From: maurice at stanford.edu (maurice stevens) Date: Tue, 09 Dec 2008 16:07:03 -0800 Subject: [Fwd: Comment epi2 SNF 2008-12-09 16:06:21: Germane update] Message-ID: <493F0827.8090607@stanford.edu> -------- Original Message -------- Subject: Comment epi2 SNF 2008-12-09 16:06:21: Germane update Date: Tue, 9 Dec 2008 16:06:21 -0800 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu The Epi Ge bottle was expected today but it had a Disc instead of a CGA fitting. We expect the bottle to arrive tomorrow with the correct fitting. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed Dec 10 17:47:22 2008 From: maurice at stanford.edu (maurice stevens) Date: Wed, 10 Dec 2008 17:47:22 -0800 Subject: Ge online Message-ID: <4940712A.8050202@stanford.edu> The Ge bottle has been changed. We recommend that you verify that your process has not changed by running a test run with your process. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From rshyam at stanford.edu Fri Dec 12 03:32:15 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Fri, 12 Dec 2008 03:32:15 -0800 Subject: epi2 free now Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Sat Dec 13 09:41:38 2008 From: maurice at stanford.edu (maurice stevens) Date: Sat, 13 Dec 2008 09:41:38 -0800 Subject: epi2 up Message-ID: <4943F3D2.1010906@stanford.edu> 13 upper bulbs replaced. Pressure PID adjusted. Ran the Ge etch program with no problems. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From masaharu at stanford.edu Sat Dec 13 10:14:27 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Sat, 13 Dec 2008 10:14:27 -0800 (PST) Subject: epi2 up In-Reply-To: <4943F3D2.1010906@stanford.edu> Message-ID: <1346794158.3688181229192067656.JavaMail.root@zm07.stanford.edu> On behalf of epi2 users, I greatly thank you and Elmer!! Masaharu Masaharu Kobayashi Ph.D candidate Department of Electrical Engineering Stanford Unversity TEL:650-521-4260 E-mail:masaharu at stanford.edu ----- Original Message ----- From: maurice stevens To: epi2 at snf.stanford.edu Sent: Sat, 13 Dec 2008 09:41:38 -0800 (PST) Subject: epi2 up 13 upper bulbs replaced. Pressure PID adjusted. Ran the Ge etch program with no problems. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Dec 16 09:52:12 2008 From: maurice at stanford.edu (Maurice Stevens) Date: Tue, 16 Dec 2008 09:52:12 -0800 Subject: Put reactor in inert idle Message-ID: <4947EACC.7020405@stanford.edu> If you want Epi2 to have more up time then make sure you put it in inert idle when it is not processing wafers. Keeping the system in active or hot idle shortens the life of the lamps. Shorten lamp life will increase the time the system is down maint.