epi2 up

maurice stevens maurice at stanford.edu
Sat Dec 13 09:41:38 PST 2008

13 upper bulbs replaced.
Pressure PID adjusted.
Ran the Ge etch program with no problems.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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