epi2 up

maurice stevens maurice at stanford.edu
Sat Dec 13 09:41:38 PST 2008


13 upper bulbs replaced.
Pressure PID adjusted.
Ran the Ge etch program with no problems.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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