epi2 up

Masaharu Kobayashi masaharu at stanford.edu
Sat Dec 13 10:14:27 PST 2008

On behalf of epi2 users,
I greatly thank you and Elmer!!


Masaharu Kobayashi
Ph.D candidate
Department of Electrical Engineering
Stanford Unversity
E-mail:masaharu at stanford.edu

----- Original Message -----
From: maurice stevens <maurice at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Sat, 13 Dec 2008 09:41:38 -0800 (PST)
Subject: epi2 up

13 upper bulbs replaced.
Pressure PID adjusted.
Ran the Ge etch program with no problems.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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