epi2 up

Masaharu Kobayashi masaharu at stanford.edu
Sat Dec 13 10:14:27 PST 2008


On behalf of epi2 users,
I greatly thank you and Elmer!!

Masaharu

Masaharu Kobayashi
Ph.D candidate
Department of Electrical Engineering
Stanford Unversity
TEL:650-521-4260
E-mail:masaharu at stanford.edu

----- Original Message -----
From: maurice stevens <maurice at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Sat, 13 Dec 2008 09:41:38 -0800 (PST)
Subject: epi2 up

13 upper bulbs replaced.
Pressure PID adjusted.
Ran the Ge etch program with no problems.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278





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