Put reactor in inert idle

Maurice Stevens maurice at stanford.edu
Tue Dec 16 09:52:12 PST 2008


If you want Epi2 to have more up time then make sure you put it in inert 
idle when it is not processing wafers.

Keeping the system in active or hot idle shortens the life of the 
lamps.  Shorten lamp life will increase the time the system is down maint.



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