From maurice at stanford.edu Fri Feb 1 17:35:31 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 01 Feb 2008 17:35:31 -0800 Subject: Backside deposition /ASML problem Message-ID: <47A3C8E3.3070102@stanford.edu> Hi Epi2 users, Three wafers from epi with backside deposition have caused the ASML stepper to shutdown. We know that many other wafers with the deposition on the back have gone through the ASML without causing any problems but we need to understand what has changed. We want to gather as much information as we can about this, so I am requesting that you send me an email (please don't send it to epi2 and spam everyone on the list) with the following information: 1. Are you seeing any deposition on the back of your wafers? If yes, has this recipe always given backside deposition? 2. How thick is your deposition? 3. What material are you depositing (Si, Ge, SiGe)? 4. Are you doing an anneal? How long? 5. Do you go into LTO after epi? Thanks for your cooperation! -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Sat Feb 2 18:39:03 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Sat, 02 Feb 2008 18:39:03 -0800 Subject: epi 2 up Message-ID: <20080202183903.0p8kc83gg0ww0ooo@webmail.stanford.edu> Homed PCV. Brought system online. It is in cold idle. ----- Forwarded message from maurice at snf.stanford.edu ----- Date: Sat, 2 Feb 2008 18:36:00 -0800 From: maurice at snf.stanford.edu Reply-To: maurice at snf.stanford.edu Subject: Re: Problem epi2 SNF 2008-02-02 09:35:38: epi2 still unusable To: epi2-pcs at snf.stanford.edu Homed PCV. Brought system online. It is in cold idle. ----- End forwarded message ----- From rshyam at stanford.edu Sun Feb 3 00:53:06 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Sun, 3 Feb 2008 00:53:06 -0800 Subject: epi2 free now Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From renshen at stanford.edu Tue Feb 5 22:12:38 2008 From: renshen at stanford.edu (Shen Ren) Date: Tue, 5 Feb 2008 22:12:38 -0800 Subject: tool free now Message-ID: <628a66910802052212q11da4571t730624c11edc504b@mail.gmail.com> Finished early. -- Best wishes, Shen Ren Department of Electrical Engineering Stanford University "The Chinese call luck opportunity and they say it knocks every day on your door. Some people hear it; some do not. It's not enough to hear opportunity knock. You must let him in, greet him, make friends and work together." - Bernard Gittelson -------------- next part -------------- An HTML attachment was scrubbed... URL: From ryw at stanford.edu Wed Feb 6 16:51:13 2008 From: ryw at stanford.edu (Yiwen Rong) Date: Wed, 6 Feb 2008 16:51:13 -0800 Subject: tool free tomorrow Message-ID: <004e01c86923$8a01e150$7d6018ac@harrisaug068> Time conflict -------------- next part -------------- An HTML attachment was scrubbed... URL: From rshyam at stanford.edu Wed Feb 6 22:37:43 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Wed, 6 Feb 2008 22:37:43 -0800 Subject: reservation released at 2 am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Feb 7 11:43:10 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Thu, 07 Feb 2008 11:43:10 -0800 Subject: No GeH4 Message-ID: <20080207114310.h2qs501jscw0ksc8@webmail.stanford.edu> The GeH4 bottle on the epi systems is empty. The new bottle is on order. We are using Ge at an extremely fast rate. Much faster than when we only had one epi system. We know we have more Ge users. How many of you are growing layers thicker than 100nm? From ehe at stanford.edu Fri Feb 8 13:39:42 2008 From: ehe at stanford.edu (Elizabeth Edwards) Date: Fri, 8 Feb 2008 13:39:42 -0800 Subject: forfeiting today 2:30pm and Sat.10am unless GeH4 bottle installed Message-ID: Until a GeH4 bottle is installed I can't use my reservations Friday (today) 2:30pm or Saturday 10am. From maurice at stanford.edu Mon Feb 11 17:07:20 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Mon, 11 Feb 2008 17:07:20 -0800 Subject: Good news! GeH4 is now available. Message-ID: <20080211170720.fdgo6thqg4cwgwgg@webmail.stanford.edu> The new HeH4 bottle is on the system and ready to run. From ofidaner at yahoo.com Tue Feb 12 11:20:41 2008 From: ofidaner at yahoo.com (Onur Fidaner) Date: Tue, 12 Feb 2008 11:20:41 -0800 (PST) Subject: epi2 res. removed wed 9 AM-1 PM Message-ID: <381907.70187.qm@web56105.mail.re3.yahoo.com> ____________________________________________________________________________________ Be a better friend, newshound, and know-it-all with Yahoo! Mobile. Try it now. http://mobile.yahoo.com/;_ylt=Ahu06i62sR8HDtDypao8Wcj9tAcJ From maurice at stanford.edu Wed Feb 13 10:22:33 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Wed, 13 Feb 2008 10:22:33 -0800 Subject: Epi2 free 13:30-18:00 today!! Message-ID: <20080213102233.cw1e49u6yo4cwcgw@webmail.stanford.edu> From masaharu at stanford.edu Wed Feb 13 19:14:49 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Wed, 13 Feb 2008 19:14:49 -0800 Subject: epi2 free from 7am-11am Message-ID: <20080213191449.5929cs3g4kwgk8cg@webmail.stanford.edu> From masaharu at stanford.edu Thu Feb 14 09:41:14 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Thu, 14 Feb 2008 09:41:14 -0800 Subject: epi2 free tomorrow 9-13pm due to delayed process plan Message-ID: <20080214094114.g57i8y8a8s0socow@webmail.stanford.edu> From maurice at stanford.edu Thu Feb 14 11:06:37 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Thu, 14 Feb 2008 11:06:37 -0800 Subject: epi2 free until 2:30 today Message-ID: <20080214110637.dep2wdetic4sgc0g@webmail.stanford.edu> Finished wafers earlier this week. Sorry for the late notice. Also free tomorrow from 1:30 to 5:00pm. enjoy -m From rshyam at stanford.edu Thu Feb 21 14:45:17 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Thu, 21 Feb 2008 14:45:17 -0800 Subject: reservation released at 4 pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Feb 22 09:51:56 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Fri, 22 Feb 2008 09:51:56 -0800 Subject: Fwd: Comment epi2 SNF 2008-02-22 09:50:38: AMAT here to work on handling issue Message-ID: <20080222095156.vbd6ltaa8c8888so@webmail.stanford.edu> Sean from AMAT is here working on handling problem. ----- Forwarded message from maurice at snf.stanford.edu ----- Date: Fri, 22 Feb 2008 09:50:39 -0800 From: maurice at snf.stanford.edu Reply-To: maurice at snf.stanford.edu Subject: Comment epi2 SNF 2008-02-22 09:50:38: AMAT here to work on handling issue To: epi2-pcs at snf.stanford.edu ----- End forwarded message ----- From masaharu at stanford.edu Sat Feb 23 07:59:37 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Sat, 23 Feb 2008 07:59:37 -0800 Subject: Done early. Free to use Message-ID: <20080223075937.sn0781meg480w4s4@webmail.stanford.edu> From gunjim at stanford.edu Sat Feb 23 11:28:30 2008 From: gunjim at stanford.edu (Marika Gunji) Date: Sat, 23 Feb 2008 11:28:30 -0800 Subject: Epi2 reservation released today Message-ID: <200802231929.m1NJTexT031808@smtp-roam.Stanford.EDU> Sorry for the short notice. Best, Marika -------------- next part -------------- An HTML attachment was scrubbed... URL: From masaharu at stanford.edu Sun Feb 24 08:34:05 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Sun, 24 Feb 2008 08:34:05 -0800 Subject: epi2 free from 3-7am Message-ID: <20080224083405.gf65apwaas0c00go@webmail.stanford.edu> From maurice at stanford.edu Mon Feb 25 15:49:48 2008 From: maurice at stanford.edu (maurice stevens) Date: Mon, 25 Feb 2008 15:49:48 -0800 Subject: EPI2 users meeting March 5th Message-ID: <47C3541C.5060200@stanford.edu> The users meeting took a break for winter but now it is back! Next Epi2 users meeting is scheduled for Wed, March 5th at 1:20-2:30 in CIS201. Suggested topics: Increased Ge usage ASML rejecting epi wafers Wafer handling problems -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278