From duygu at stanford.edu Fri Jan 11 14:29:08 2008 From: duygu at stanford.edu (Duygu Kuzum) Date: Fri, 11 Jan 2008 14:29:08 -0800 Subject: reservation cancelled 2-5pm In-Reply-To: <4759A63F.90702@stanford.edu> References: <4759A63F.90702@stanford.edu> Message-ID: <20080111142908.a90s4cdz4ww8gsks@webmail.stanford.edu> From rshyam at stanford.edu Sun Jan 13 23:30:53 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Sun, 13 Jan 2008 23:30:53 -0800 Subject: epi2 reservation released 12 am tonight Message-ID: Sorry for the late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From ofidaner at yahoo.com Fri Jan 18 19:26:52 2008 From: ofidaner at yahoo.com (Onur Fidaner) Date: Fri, 18 Jan 2008 19:26:52 -0800 (PST) Subject: epi2 manual mode only Message-ID: <821563.25842.qm@web56103.mail.re3.yahoo.com> Dear epi 2 Users, Epi 2 has given a lot of trouble today. Maurice and I worked on it and managed to get it to work in a metastable state. Please observe the following and let's hope we survive the 3-day weekend: Use only in the manual mode: * Bring epi to active idle state, load your wafers. * DO NOT DO ANYTHING UNTIL WAFER DETECTION IS COMPLETE. * system->control: select manual; select the recipe you want to run. * wafer->monitor wafers: select one of the wafers, select "source for move" then select ch A and select "destination for move" * DO NOT DO ANYTHING UNTIL YOU SEE YOUR WAFER IN THE CHAMBER * system->control: Now you should see a little "Run" button next to your recipe name; select run * Once your recipe is finished, select the wafer in the chamber, select "source for move" select chamber F and select "destination for move" * once the wafer moves to cooling chamber go to system->control * click the run button next to the appropriate cleaning recipe. * wafer->monitor wafers; move your wafer back to casette When you are done, if Load/Unload LLA doesn't work, you may first try LLA->backfill out. DO NOT USE LLB, DO NOT GIVE ANY COMMANDS. Good luck! Onur ____________________________________________________________________________________ Be a better friend, newshound, and know-it-all with Yahoo! Mobile. Try it now. http://mobile.yahoo.com/;_ylt=Ahu06i62sR8HDtDypao8Wcj9tAcJ From ehe at stanford.edu Mon Jan 28 05:54:36 2008 From: ehe at stanford.edu (Elizabeth Edwards) Date: Mon, 28 Jan 2008 05:54:36 -0800 Subject: epi2 shutdown/removing 7-10am reservation Message-ID: Previous user had to shutdown epi2 due to a heater contactor/ low water flow problem, so I am removing my 7-10am reservation and going back to bed :) From jhpark9 at stanford.edu Mon Jan 28 12:16:31 2008 From: jhpark9 at stanford.edu (JinHong Park) Date: Mon, 28 Jan 2008 12:16:31 -0800 Subject: ep2 free 2-5:30pm reservation In-Reply-To: References: Message-ID: <20080128121631.smgk96j3kso8c8ss@webmail.stanford.edu> ep2 free 2-5:30pm reservation From maurice at stanford.edu Tue Jan 29 15:38:52 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Tue, 29 Jan 2008 15:38:52 -0800 Subject: finish early...free til 17:30 Message-ID: <20080129153852.smnw43dog00g0o8o@webmail.stanford.edu> free til 5:30pm From maurice at stanford.edu Wed Jan 30 18:03:30 2008 From: maurice at stanford.edu (maurice stevens) Date: Wed, 30 Jan 2008 18:03:30 -0800 Subject: Epi2 reset Message-ID: <47A12C72.2050005@stanford.edu> -------- Original Message -------- Subject: Re: Problem epi2 SNF 2008-01-18 19:31:12: manual mode only Date: Wed, 30 Jan 2008 18:01:53 -0800 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Elmer reset the system. The loadlock B is now working. Automatic mode is also working -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278