Epi2 reset

maurice stevens maurice at stanford.edu
Wed Jan 30 18:03:30 PST 2008



-------- Original Message --------
Subject: 	Re: Problem epi2 SNF 2008-01-18 19:31:12: manual mode only
Date: 	Wed, 30 Jan 2008 18:01:53 -0800
From: 	maurice at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Elmer reset the system. 
The loadlock B is now working.
Automatic mode is also working



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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