From slcheng at stanford.edu Tue Jul 1 20:48:53 2008 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Tue, 1 Jul 2008 20:48:53 -0700 Subject: EPI2 is under "isolated" mode right now Message-ID: <000001c8dbf6$8c670a60$a5351f20$@edu> To all the EPI users I accidently hit the "offline" command when the system is under cold idle. For some reason, it show an error message, the rp stepper exceed the max busy time, and went into the "isolated" mode. I don't know how to make it back to online. I am very sorry for the inconvenience to all the users, especially to those planning to run it tonight. I didn't report a shut down because I think maybe some experienced users may had similar experience before and will be able to solve the problem. Sorry again. Szu-Lin Cheng -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Jul 2 10:49:37 2008 From: maurice at stanford.edu (Maurice Stevens) Date: Wed, 02 Jul 2008 10:49:37 -0700 Subject: Active idle temp Message-ID: <486BBFB1.4010105@stanford.edu> Someone changed the Active idle temperature on Epi2 from the normal 700c. This set off a series of events that caused the system to be down last night. Could this someone please send me an email and explain why they changed it? -maurice From jstiver at student.umass.edu Wed Jul 2 12:10:21 2008 From: jstiver at student.umass.edu (jstiver at student.umass.edu) Date: Wed, 02 Jul 2008 15:10:21 -0400 Subject: epi free at 3:00 today (wed.) Message-ID: <1215025821.486bd29d37e27@mail-www.oit.umass.edu> From jhpark9 at stanford.edu Fri Jul 4 01:16:30 2008 From: jhpark9 at stanford.edu (jhpark9 at stanford.edu) Date: Fri, 04 Jul 2008 01:16:30 -0700 Subject: epi2 free 4pm-11pm (Friday) Message-ID: <20080704011630.vn0tm4rhwgcg4gwo@webmail.stanford.edu> . From gthareja at stanford.edu Fri Jul 4 10:44:18 2008 From: gthareja at stanford.edu (gthareja at stanford.edu) Date: Fri, 04 Jul 2008 10:44:18 -0700 Subject: epi2 free from 13:00 today Message-ID: <20080704104418.30g4x2i680cso0go@webmail.stanford.edu> samples not ready, sorry for the short notice From masatoi at stanford.edu Sat Jul 5 01:17:30 2008 From: masatoi at stanford.edu (masatoi at stanford.edu) Date: Sat, 05 Jul 2008 01:17:30 -0700 Subject: Epi2 free from 10:00am to 3:00pm tomorrow In-Reply-To: <20080704104418.30g4x2i680cso0go@webmail.stanford.edu> References: <20080704104418.30g4x2i680cso0go@webmail.stanford.edu> Message-ID: From rshyam at stanford.edu Mon Jul 7 02:58:36 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Mon, 7 Jul 2008 02:58:36 -0700 Subject: epi2 free now Message-ID: sorry for the late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Jul 7 16:06:15 2008 From: maurice at stanford.edu (maurice stevens) Date: Mon, 07 Jul 2008 16:06:15 -0700 Subject: No silane tonight Message-ID: <4872A167.5010101@stanford.edu> No silane tonight. We will update you tomorrow on the new pigtail installation. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From hweiyin at stanford.edu Mon Jul 7 16:12:16 2008 From: hweiyin at stanford.edu (Serene Koh) Date: Mon, 7 Jul 2008 16:12:16 -0700 Subject: Epi2 free today: 5pm to 8pm Message-ID: <8b7d24450807071612r365a0cbbjfeed2173e3938463@mail.gmail.com> No silane. From maurice at stanford.edu Tue Jul 8 13:59:41 2008 From: maurice at stanford.edu (Maurice Stevens) Date: Tue, 08 Jul 2008 13:59:41 -0700 Subject: Silane is on Message-ID: <4873D53D.7020606@stanford.edu> Mike writes: Old silane bottle with 50 lbs back on line. New bottle had a leak. Replacement is on order. We may or may not have enough until it arrives. Will update coral on bottle pressure. From jhpark9 at stanford.edu Tue Jul 8 15:58:55 2008 From: jhpark9 at stanford.edu (jhpark9 at stanford.edu) Date: Tue, 08 Jul 2008 15:58:55 -0700 Subject: epi2 free tomorrow 4pm-8pm Message-ID: <20080708155855.n1gdkct5gkogkoks@webmail.stanford.edu> . From maurice at stanford.edu Thu Jul 10 15:11:54 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Thu, 10 Jul 2008 15:11:54 -0700 Subject: Epi2 up Message-ID: <20080710151154.myk97lzym8kg4ww4@webmail.stanford.edu> Cooling water is back on. Elmer has reset the overtemp switch and run both etch programs several times with out any problems. Please report any new problems on coral. -m From maurice at stanford.edu Fri Jul 11 16:28:11 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 11 Jul 2008 16:28:11 -0700 Subject: epi2 SNF 2008-07-11 15:15:28: Update] Message-ID: <4877EC8B.6010809@stanford.edu> From Elmer: -------- Original Message -------- Subject: Comment epi2 SNF 2008-07-11 15:15:28: Update Date: Fri, 11 Jul 2008 15:15:30 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu We do not have the susceptor in stock. The vendor (Applied Materials) does not sell this part anymore because it has been discontinued. Ted has contacted an Applied Materials sanctioned second source vendor but they said that they would still need to obtain Applied's permission in order to contact the susceptor's manufacturer. Should have an update early next week. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri Jul 18 16:53:47 2008 From: maurice at stanford.edu (maurice stevens) Date: Fri, 18 Jul 2008 16:53:47 -0700 Subject: [Fwd: Comment epi2 SNF 2008-07-18 15:17:05: Update] Message-ID: <48812D0B.3070408@stanford.edu> Update from Elmer -------- Original Message -------- Subject: Comment epi2 SNF 2008-07-18 15:17:05: Update Date: Fri, 18 Jul 2008 15:17:06 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu No update on the ETA of new susceptor. Ted should have an update on Monday. When we opened the chamber to recenter the susceptor, we found that the pin lift quartz had broken. currently cleaning the chamber, trying to remove all the broken quartz pieces out of the lift shaft well. The chamber should be ready for further HCl cleans by 3 pm on Monday. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu Jul 24 17:08:31 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Thu, 24 Jul 2008 17:08:31 -0700 Subject: Update:Susceptor is 100% clear Message-ID: <20080724170831.as728ba8w0sows0c@webmail.stanford.edu> Susceptor is 100% clear. There is a pinhole in center on wafer pocket. - Wafer handling error: System shut itself down while loading a wafer for a test. Wafer is in transfer chamber. Wait for maint to recover wafer! From maurice at stanford.edu Tue Jul 29 17:11:42 2008 From: maurice at stanford.edu (maurice stevens) Date: Tue, 29 Jul 2008 17:11:42 -0700 Subject: Shutdown epi2 SNF 2008-07-29 17:03:31: Testing] Message-ID: <488FB1BE.2010909@stanford.edu> Running wafers to see if processes have drifted, wafers are haze free, backsides are clean and we have no over temp problems. Hyun-Yong Yu is running Ge test. He will report on result. Tool may be up in the morning. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed Jul 30 10:11:27 2008 From: maurice at stanford.edu (maurice stevens) Date: Wed, 30 Jul 2008 10:11:27 -0700 Subject: Epi2 update Message-ID: <4890A0BF.4010101@stanford.edu> About 10 wafers have been processed through the system. The haze that we saw on the first wafers has cleared up (as we expected). Hyun-Yong reports that he saw particles on all the wafers but it seems to become less as more wafers are run. The susceptor height was adjusted by Elmer and AMAT field service to fix wafer handling issues...this may change the gas flow across the wafer...this may change your processes. I suggest you run tests to re characterize your process before committing "good wafers". -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278