[Fwd: Comment epi2 SNF 2008-07-18 15:17:05: Update]

maurice stevens maurice at stanford.edu
Fri Jul 18 16:53:47 PDT 2008


Update from Elmer

-------- Original Message --------
Subject: 	Comment epi2 SNF 2008-07-18 15:17:05: Update
Date: 	Fri, 18 Jul 2008 15:17:06 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



No update on the ETA of new susceptor.  Ted should have an update on Monday. 
When we opened the chamber to recenter the susceptor, we found that the pin lift quartz had broken.  
currently cleaning the chamber, trying to remove all the broken quartz pieces out of the lift shaft well.  
The chamber should be ready for further HCl cleans by 3 pm on Monday.  



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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