Update:Susceptor is 100% clear

maurice at stanford.edu maurice at stanford.edu
Thu Jul 24 17:08:31 PDT 2008


Susceptor is 100% clear.
There is a pinhole in center on wafer pocket.
   -
Wafer handling error: System shut itself down  while loading a wafer  
for a test.

Wafer is in transfer chamber.
Wait for maint to recover wafer!






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