Shutdown epi2 SNF 2008-07-29 17:03:31: Testing]

maurice stevens maurice at
Tue Jul 29 17:11:42 PDT 2008

Running wafers to see if processes have drifted, wafers are haze free, backsides are clean and we have no over temp problems.
Hyun-Yong Yu is running Ge test.  He will report on result.  Tool may be up in the morning.

maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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