Shutdown epi2 SNF 2008-07-29 17:03:31: Testing]

maurice stevens maurice at stanford.edu
Tue Jul 29 17:11:42 PDT 2008




Running wafers to see if processes have drifted, wafers are haze free, backsides are clean and we have no over temp problems.
Hyun-Yong Yu is running Ge test.  He will report on result.  Tool may be up in the morning.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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