From rshyam at stanford.edu Sun Jun 1 00:13:17 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Sun, 1 Jun 2008 00:13:17 -0700 Subject: epi2 free now Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From hweiyin at stanford.edu Mon Jun 2 19:00:24 2008 From: hweiyin at stanford.edu (Serene Koh) Date: Mon, 2 Jun 2008 19:00:24 -0700 Subject: Epi2: Reservations canceled Tuesday 8.30am to 11.30am Message-ID: <8b7d24450806021900u41a13f11n7a592615692416a8@mail.gmail.com> Sorry for the late notice. From angiel at stanford.edu Tue Jun 3 14:49:49 2008 From: angiel at stanford.edu (Angie Lin) Date: Tue, 3 Jun 2008 14:49:49 -0700 Subject: epi2 Wed 11:30am-2:30pm cancelled Message-ID: From slcheng at stanford.edu Tue Jun 3 17:30:08 2008 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Tue, 3 Jun 2008 17:30:08 -0700 Subject: Epi 2 free Today 1900 to 2200 Message-ID: <000f01c8c5da$24c6f460$6e54dd20$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From rshyam at stanford.edu Wed Jun 4 03:02:13 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Wed, 4 Jun 2008 03:02:13 -0700 Subject: epi2 free now Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhpark9 at stanford.edu Fri Jun 13 14:37:06 2008 From: jhpark9 at stanford.edu (jhpark9 at stanford.edu) Date: Fri, 13 Jun 2008 14:37:06 -0700 Subject: epi free from 4pm to 6pm Message-ID: <20080613143706.4zvtkrmxus4kgoc0@webmail.stanford.edu> Sorry for late notice. From masaharu at stanford.edu Sun Jun 15 12:49:13 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Sun, 15 Jun 2008 12:49:13 -0700 Subject: doped epi Si (not Ge) Message-ID: <20080615124913.sjwbw0zzksgs840w@webmail.stanford.edu> Hello epi2 users, I would like to ask you, does anybody have doped "epi" Si (not Ge!) calibration data? The purpose of this is to deposit just blanket doped Si on CZ silicon substrate. I would like to know, gas(DCS or SiH4, AsH3 or PH3), temperature, pressure, growth rate, doping concentration, surface morphology. Data is not necessary to be complete. I would be happy if I could know the first guess in epi centura. Thank you in advance. Masaharu From gthareja at stanford.edu Sun Jun 15 22:16:39 2008 From: gthareja at stanford.edu (gthareja at stanford.edu) Date: Sun, 15 Jun 2008 22:16:39 -0700 Subject: Hydrogen annealing for native oxide removal Message-ID: <20080615221639.iyzsro3io8ckgwgs@webmail.stanford.edu> Dear epi users. Please let me know a lower temperature Hydrogen annealing recepie for native oxide removal Currently i am using 1100C, 1min. I also see some users using 900C, 5 min. Does anyone go lower temp or shorter time than this and is sure that the native oxide is gone ? thanks in advance -gaurav From filip at stanford.edu Sat Jun 21 15:35:31 2008 From: filip at stanford.edu (Filip Crnogorac) Date: Sat, 21 Jun 2008 15:35:31 -0700 Subject: Epi2 free until 6pm Message-ID: <20080621153531.wvsoy61g0sc0o88k@webmail.stanford.edu> From maurice at stanford.edu Mon Jun 23 14:18:04 2008 From: maurice at stanford.edu (Maurice Stevens) Date: Mon, 23 Jun 2008 14:18:04 -0700 Subject: Free until 18:00 Message-ID: <4860130C.3060707@stanford.edu> Several users canceled reservations...but users didn't send out emails to let anyone know the tool was free...bad users From masatoi at stanford.edu Mon Jun 23 18:13:43 2008 From: masatoi at stanford.edu (masatoi at stanford.edu) Date: Mon, 23 Jun 2008 18:13:43 -0700 Subject: Epi2 free until 10:00pm In-Reply-To: <4860130C.3060707@stanford.edu> References: <4860130C.3060707@stanford.edu> Message-ID: Samples are not ready. I am sorry for late notice. From ofidaner at yahoo.com Thu Jun 26 08:47:43 2008 From: ofidaner at yahoo.com (Onur Fidaner) Date: Thu, 26 Jun 2008 08:47:43 -0700 (PDT) Subject: epi2 available until 13:00 Message-ID: <118835.64033.qm@web56106.mail.re3.yahoo.com> From renshen at stanford.edu Thu Jun 26 13:55:14 2008 From: renshen at stanford.edu (Shen Ren) Date: Thu, 26 Jun 2008 13:55:14 -0700 Subject: Free 3:30 to 7:30 Message-ID: <628a66910806261355y5462d186n6f4b7527d6b4029@mail.gmail.com> Sorry for late notice. -- Best wishes, Shen Ren Department of Electrical Engineering Stanford University Success is not the key to happiness. Happiness is the key to success. If you love what you are doing, you will be successful. -Albert Schweitzer From jhpark9 at stanford.edu Thu Jun 26 19:02:56 2008 From: jhpark9 at stanford.edu (jhpark9 at stanford.edu) Date: Thu, 26 Jun 2008 19:02:56 -0700 Subject: epi2 free tomorrow 2pm-6pm Message-ID: <20080626190256.ckq5og9adwog8cww@webmail.stanford.edu> . From rshyam at stanford.edu Thu Jun 26 19:21:58 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Thu, 26 Jun 2008 19:21:58 -0700 Subject: epi2 free 12 am tonight Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From gthareja at stanford.edu Fri Jun 27 12:15:57 2008 From: gthareja at stanford.edu (gthareja at stanford.edu) Date: Fri, 27 Jun 2008 12:15:57 -0700 Subject: epi free from 2pm Message-ID: <20080627121557.9lmj3j4oowcko80k@webmail.stanford.edu> sorry for the late notice, samples not ready. thanks -gaurav From jhpark9 at stanford.edu Mon Jun 30 14:23:54 2008 From: jhpark9 at stanford.edu (JinHong Park) Date: Mon, 30 Jun 2008 14:23:54 -0700 Subject: epi2 free 8:30pm-12am tonight In-Reply-To: References: Message-ID: <20080630142354.xdlv55op0kcsco44@webmail.stanford.edu> Sorry for late notice. Wafers are not ready.