doped epi Si (not Ge)

Masaharu Kobayashi masaharu at stanford.edu
Sun Jun 15 12:49:13 PDT 2008


Hello epi2 users,

I would like to ask you,
does anybody have doped "epi" Si (not Ge!) calibration data?

The purpose of this is to deposit just blanket doped Si on CZ silicon  
substrate.

I would like to know,
gas(DCS or SiH4, AsH3 or PH3), temperature, pressure, growth rate,
doping concentration, surface morphology.

Data is not necessary to be complete.

I would be happy if I could know the first guess in epi centura.

Thank you in advance.

Masaharu





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