Hydrogen annealing for native oxide removal

gthareja at stanford.edu gthareja at stanford.edu
Sun Jun 15 22:16:39 PDT 2008


Dear epi users.

Please let me know a lower temperature Hydrogen annealing recepie for  
native oxide removal

Currently i am using 1100C, 1min.

I also see some users using 900C, 5 min.

Does anyone go lower temp or shorter time than this and is sure that  
the native oxide is gone ?

thanks in advance
-gaurav



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