Use LOAD LOCK B

maurice stevens maurice at stanford.edu
Mon Mar 17 09:46:19 PDT 2008


We have had loading problems with load lock A.  When AMAT field service 
was here a couple of weeks ago, they calibrated both load locks.  But 
they recommended that we use load lock B as the primary lock. 


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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