Today 16:30 -20:30 reservation released

Donghun Choi donghun.choi at stanford.edu
Tue Mar 18 13:23:29 PDT 2008


sorry for short notice
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  Donghun Choi
  Ph.D Candidate

  Dep. of Electrical Engineering         Center for Integrated Systerms
  Prof. James S. Harris group              420 Via Ortega, CIS-X Rm 126x
  Solid State & Photonics Lab             Stanford, CA 94305
  Ph: (650) 725-8313  Fax : (650)  723-4659
  E-Mail:donghun.choi at stanford.edu
  http://snowboard.stanford.edu/~dhchoi
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----- Original Message ----- 
From: "maurice stevens" <maurice at stanford.edu>
To: <epi2 at snf.stanford.edu>
Sent: Monday, March 17, 2008 9:46 AM
Subject: Use LOAD LOCK B


> We have had loading problems with load lock A.  When AMAT field service 
> was here a couple of weeks ago, they calibrated both load locks.  But they 
> recommended that we use load lock B as the primary lock.
>
> -- 
> maurice at stanford.edu
>
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA  94305
> P. (650)725-3660
> F. (650)725.6278
> 





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