Today 16:30 -20:30 reservation released
Donghun Choi
donghun.choi at stanford.edu
Tue Mar 18 13:23:29 PDT 2008
sorry for short notice
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Donghun Choi
Ph.D Candidate
Dep. of Electrical Engineering Center for Integrated Systerms
Prof. James S. Harris group 420 Via Ortega, CIS-X Rm 126x
Solid State & Photonics Lab Stanford, CA 94305
Ph: (650) 725-8313 Fax : (650) 723-4659
E-Mail:donghun.choi at stanford.edu
http://snowboard.stanford.edu/~dhchoi
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----- Original Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: <epi2 at snf.stanford.edu>
Sent: Monday, March 17, 2008 9:46 AM
Subject: Use LOAD LOCK B
> We have had loading problems with load lock A. When AMAT field service
> was here a couple of weeks ago, they calibrated both load locks. But they
> recommended that we use load lock B as the primary lock.
>
> --
> maurice at stanford.edu
>
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA 94305
> P. (650)725-3660
> F. (650)725.6278
>
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