unintentional doping in Ge

Onur Fidaner ofidaner at yahoo.com
Mon May 12 10:13:24 PDT 2008


Dear epi2 users,

Has anybody measured the unintentional doping level on Ge films (thickness >= 1 um) grown on silicon? Also is there any recipe that I can start with for (highly) doped Ge growths?

Thanks,

Onur



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