Thick Ge recipe

Maryam Ziaei-Moayyed maryamzm at stanford.edu
Mon May 12 22:06:00 PDT 2008


Hi epi2 users,

I was wondering if anyone has a recipe for depositing thick Ge? I  
don't care about the quality of this Ge layer...I just need ~ 1um so I  
could use the fastest recipe and deposit at high temp...any inputs  
would be very much appreciated :)

Thanks,
Maryam



Quoting Onur Fidaner <ofidaner at yahoo.com>:

> Dear epi2 users,
>
> Has anybody measured the unintentional doping level on Ge films   
> (thickness >= 1 um) grown on silicon? Also is there any recipe that   
> I can start with for (highly) doped Ge growths?
>
> Thanks,
>
> Onur
>
>
>
>         
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