Thick Ge recipe

Maryam Ziaei-Moayyed maryamzm at
Mon May 12 22:06:00 PDT 2008

Hi epi2 users,

I was wondering if anyone has a recipe for depositing thick Ge? I  
don't care about the quality of this Ge layer...I just need ~ 1um so I  
could use the fastest recipe and deposit at high temp...any inputs  
would be very much appreciated :)


Quoting Onur Fidaner <ofidaner at>:

> Dear epi2 users,
> Has anybody measured the unintentional doping level on Ge films   
> (thickness >= 1 um) grown on silicon? Also is there any recipe that   
> I can start with for (highly) doped Ge growths?
> Thanks,
> Onur
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