Thick Ge recipe
maryamzm at stanford.edu
Mon May 12 22:06:00 PDT 2008
Hi epi2 users,
I was wondering if anyone has a recipe for depositing thick Ge? I
don't care about the quality of this Ge layer...I just need ~ 1um so I
could use the fastest recipe and deposit at high temp...any inputs
would be very much appreciated :)
Quoting Onur Fidaner <ofidaner at yahoo.com>:
> Dear epi2 users,
> Has anybody measured the unintentional doping level on Ge films
> (thickness >= 1 um) grown on silicon? Also is there any recipe that
> I can start with for (highly) doped Ge growths?
> Be a better friend, newshound, and
> know-it-all with Yahoo! Mobile. Try it now.
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