epi2 free untill 5:30pm/ Susceptor changed

maurice stevens maurice at stanford.edu
Tue Nov 11 12:00:37 PST 2008

Elmer changed the susceptor this morning.  He then purged it and ran two big etches. 
I have done three silicon tests (with big etches in between).  We inspected the wafers and they are all free of haze.

I have released the rest of my reservation for today.


maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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