Epi2 up/ bottom lamps replaced

maurice stevens maurice at stanford.edu
Mon Nov 17 18:05:01 PST 2008

Sean for AMAT replaced lamps from bottom housing.
System has been etched and coated.
Watch your recipes during heat up steps...it may heat up faster now.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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