Epi2 up/ bottom lamps replaced

maurice stevens maurice at stanford.edu
Mon Nov 17 18:05:01 PST 2008


Sean for AMAT replaced lamps from bottom housing.
System has been etched and coated.
Watch your recipes during heat up steps...it may heat up faster now.

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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