From maurice at stanford.edu Thu Oct 2 11:26:02 2008 From: maurice at stanford.edu (Maurice Stevens) Date: Thu, 02 Oct 2008 11:26:02 -0700 Subject: LL pump replaced/system up Message-ID: <48E5123A.2050803@stanford.edu> see coral for detailss From maurice at stanford.edu Thu Oct 2 13:48:30 2008 From: maurice at stanford.edu (maurice stevens) Date: Thu, 02 Oct 2008 13:48:30 -0700 Subject: [Fwd: Comment epi SNF 2008-10-02 13:11:11: Chamber] Message-ID: <48E5339E.7020508@stanford.edu> Update from Mike Dickey: -------- Original Message -------- Subject: Comment epi SNF 2008-10-02 13:11:11: Chamber Date: Thu, 2 Oct 2008 13:11:12 -0700 From: mdickey at snf.stanford.edu To: epi-pcs at snf.stanford.edu New chamber will be coming in on tuesday Oct 7th -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Mon Oct 6 10:02:04 2008 From: maurice at stanford.edu (maurice stevens) Date: Mon, 06 Oct 2008 10:02:04 -0700 Subject: Update overtemp Message-ID: <48EA448C.1030904@stanford.edu> Please see Elmer's comment below. The system was run after the initial over temp alarm and compounded the coated dome issue. The system will now be down for several days at the very least. -------- Original Message -------- Subject: Comment epi2 SNF 2008-10-06 09:42:13: Update overtemp Date: Mon, 6 Oct 2008 09:42:13 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Reset the lamp housing over temperature safety switch. Found the dome is heavily encrusted with deposition. Unable to run an HCl clean since the dome now is opaque. Will purge the chamber for 24 hours before opening. Will assess the damage to the chamber components tomorrow. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Oct 7 16:34:51 2008 From: maurice at stanford.edu (maurice stevens) Date: Tue, 07 Oct 2008 16:34:51 -0700 Subject: epi2 is up Message-ID: <48EBF21B.60406@stanford.edu> Elmer and Mike inspected the chamber and replace the dome. We also deposited 4um of Si on the chamber and ran the standard "Etch-CoatA" etch recipe then opened the chamber to inspect the dome. The etch ran with no alarm and the temp/gas flows were at the requested setpoints. The dome was clean. We only allow 3um max of deposition in the chamber per run and each run must me followed by an etch. If you can't run the etch (over temp problem), stop so we can inspect the chamber. Don't abort the etch program. Let it run to the end. If you get strange results from a recipe that has been successful in the recent past, stop so we can inspect the chamber. We are reserving the reactor everyday at 9:30 am to inspect the chamber. This will continue this until we have confidence that a daily inspection is not needed. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From hweiyin at stanford.edu Fri Oct 17 10:01:57 2008 From: hweiyin at stanford.edu (Serene Koh) Date: Fri, 17 Oct 2008 10:01:57 -0700 Subject: epi2 reservation canceled today 10am-2pm Message-ID: <8b7d24450810171001u3864d6fbi8e7fa235482b9ca1@mail.gmail.com> Elmer is still working on the system. From filip at stanford.edu Mon Oct 20 20:30:05 2008 From: filip at stanford.edu (Filip Crnogorac) Date: Mon, 20 Oct 2008 20:30:05 -0700 (PDT) Subject: Epi2 free Tue 10:30-1:30pm (eom) Message-ID: <2003040878.566751224559805641.JavaMail.root@zm09.stanford.edu> From rishi.kant.81 at gmail.com Tue Oct 21 10:26:21 2008 From: rishi.kant.81 at gmail.com (Rishi Kant) Date: Tue, 21 Oct 2008 10:26:21 -0700 Subject: 11:30 - 1:30 reservation deleted Message-ID: <48FE10BD.3080405@gmail.com> Could not finish wafers due to lampoly problems. From hweiyin at stanford.edu Tue Oct 28 09:37:04 2008 From: hweiyin at stanford.edu (Serene Koh) Date: Tue, 28 Oct 2008 09:37:04 -0700 Subject: epi2 reservation cancelled today 2.30pm-6.30pm Message-ID: <8b7d24450810280937l2ec31934lb10f3711fd0445e1@mail.gmail.com> Sorry for the late notice, not ready to run equipment. Since coral is down now, I am unable to cancel the reservation on coral. From rshyam at stanford.edu Wed Oct 29 23:08:10 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Wed, 29 Oct 2008 23:08:10 -0700 Subject: epi2 free from 12 am to 4.30 am tonight Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From ofidaner at yahoo.com Thu Oct 30 10:12:30 2008 From: ofidaner at yahoo.com (Onur Fidaner) Date: Thu, 30 Oct 2008 10:12:30 -0700 (PDT) Subject: epi2 reservations Message-ID: <725092.97928.qm@web56102.mail.re3.yahoo.com> I deleted quite a few reservations today and tomorrow, since I have to leave due to a family emergency. Thanks, Onur