From maurice at stanford.edu Mon Sep 8 17:59:05 2008 From: maurice at stanford.edu (maurice at stanford.edu) Date: Mon, 08 Sep 2008 17:59:05 -0700 Subject: EPI2 running/hazy Wwafers Message-ID: <20080908175905.brqrmpmhkw80gco0@webmail.stanford.edu> The pump, susceptor support and the pins have been replaced. The system was at atm for almost a week so we are seeing haze from the first wafers coming out of the system. We have run 4 but it normally takes 6 to 10 runs before the hazy goes away (inspecting them under the UV light). From maurice at stanford.edu Tue Sep 16 16:33:23 2008 From: maurice at stanford.edu (Maurice Stevens) Date: Tue, 16 Sep 2008 16:33:23 -0700 Subject: haze tests complete /system up Message-ID: <48D04243.8080202@stanford.edu> Log your runs in the logbook! -------------- next part -------------- An embedded message was scrubbed... From: maurice at snf.stanford.edu Subject: Re: Shutdown epi2 SNF 2008-09-16 13:46:17: testing Haze Date: Tue, 16 Sep 2008 16:32:14 -0700 Size: 1733 URL: From jrjain at stanford.edu Thu Sep 18 13:55:03 2008 From: jrjain at stanford.edu (Raja Jain) Date: Thu, 18 Sep 2008 13:55:03 -0700 Subject: epi2 free at 6pm Message-ID: <000601c919d0$d2e08030$78a18090$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From gthareja at stanford.edu Tue Sep 23 16:14:30 2008 From: gthareja at stanford.edu (Gaurav Thareja) Date: Tue, 23 Sep 2008 16:14:30 -0700 (PDT) Subject: epi2 released from 6:00 pm Message-ID: <1928450349.1508071222211670833.JavaMail.root@zm06.stanford.edu> sorry for the late notice From rshyam at stanford.edu Tue Sep 23 22:07:33 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Tue, 23 Sep 2008 22:07:33 -0700 Subject: reservations removed tonight and tomorrow night 12- 6 am Message-ID: sorry for the late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From slcheng at stanford.edu Tue Sep 23 22:16:15 2008 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Tue, 23 Sep 2008 22:16:15 -0700 Subject: reservations removed tonight and tomorrow night 12- 6 am In-Reply-To: References: Message-ID: <000301c91e04$ab7ba780$0272f680$@edu> I will take 12-4am tonight and release tomorrow's 10am to 2pm From: shyam.raghunathan at gmail.com [mailto:shyam.raghunathan at gmail.com] On Behalf Of Shyam Raghunathan Sent: Tuesday, September 23, 2008 10:08 PM To: epi2 at snf.stanford.edu Subject: reservations removed tonight and tomorrow night 12- 6 am sorry for the late notice No virus found in this incoming message. Checked by AVG - http://www.avg.com Version: 8.0.169 / Virus Database: 270.7.1/1687 - Release Date: 2008/9/23 ?U?E 06:32 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Tue Sep 30 15:07:35 2008 From: maurice at stanford.edu (maurice stevens) Date: Tue, 30 Sep 2008 15:07:35 -0700 Subject: 2008-09-30 14:57:40: Update LL pump Message-ID: <48E2A327.2020201@stanford.edu> from Elmer: -------- Original Message -------- Subject: Comment epi2 SNF 2008-09-30 14:57:40: Update LL pump Date: Tue, 30 Sep 2008 14:57:40 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Pump has been ordered. Vendor will deliver the pump as soon as they receive a PO. It will take about 4 hours to install and check the pump. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278