From maurice at stanford.edu Thu Apr 2 18:06:35 2009 From: maurice at stanford.edu (Maurice Stevens) Date: Thu, 02 Apr 2009 18:06:35 -0700 Subject: EPI2 update 4/2/09 Message-ID: <49D5611B.5010407@stanford.edu> System is back together. Silicon wafers are haze free. There is still haze on the Ge wafers. I have set the machine up to run two more Ge deposition that should finish aound midnight. From maurice at stanford.edu Fri Apr 3 16:32:55 2009 From: maurice at stanford.edu (maurice stevens) Date: Fri, 03 Apr 2009 16:32:55 -0700 Subject: Epi2 down/ low dome pressue Message-ID: <49D69CA7.5000802@stanford.edu> The system has shut itself down and is giving two errors...one for high pressure and one for low dome pressure. Elmer has contacted AMAT FS with the error codes. Sean may be in to look at the system (it is not unusual for Sean to come at night or on the weekends so keep your finger crossed). *Process update:* Silicon wafers are looking good. Andrew ran Si wafers and wafers with oxides and both gave him result that were similar to what he got before the major maint was done. I am still see haze and particles on the Ge wafers (using SLGE-DOP2 recipe). -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From grahamab at stanford.edu Tue Apr 7 13:00:39 2009 From: grahamab at stanford.edu (Andrew Blake Graham) Date: Tue, 7 Apr 2009 13:00:39 -0700 (PDT) Subject: epi2 free Message-ID: <1967509091.2240291239134439771.JavaMail.root@zm06.stanford.edu> Maurice let me use it early and it's free now. Sorry for the late notice. From maurice at stanford.edu Tue Apr 7 20:50:25 2009 From: maurice at stanford.edu (Maurice M Stevens) Date: Tue, 7 Apr 2009 20:50:25 -0700 (PDT) Subject: Arsine/Phosphine flows In-Reply-To: <647316763.1979851239162563796.JavaMail.root@zm03.stanford.edu> Message-ID: <1236882207.1980111239162625471.JavaMail.root@zm03.stanford.edu> We have had a request to resize the Arsine/Phosphine MFC. We would like to gather some info to help make a decision. Please answer the following question and send it back to me. Do you use Arsine? If so, what flow? What is your target doping? Are you getting you target? Do you use Phosphine? If so, what flow? What is your target doping? Are you getting you target? From grahamab at stanford.edu Wed Apr 8 11:15:52 2009 From: grahamab at stanford.edu (Andrew Blake Graham) Date: Wed, 8 Apr 2009 11:15:52 -0700 (PDT) Subject: epi2 free 6-9pm Message-ID: <1381082821.2456311239214552903.JavaMail.root@zm06.stanford.edu> other equipment I need is still down. From maurice at stanford.edu Thu Apr 9 11:16:20 2009 From: maurice at stanford.edu (Maurice Stevens) Date: Thu, 09 Apr 2009 11:16:20 -0700 Subject: Log your runs/dopant gas Message-ID: <49DE3B74.9090907@stanford.edu> Please log your runs in the log book. Also. please write write the dopant gas (not just Dop1...write arsine, phosphine...) on the long sheet so that the next user knows. This is especially important if you are running Arsine. -m From rshyam at stanford.edu Mon Apr 13 01:33:25 2009 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Mon, 13 Apr 2009 01:33:25 -0700 (PDT) Subject: epi2 free at 2 am tonight Message-ID: <878197453.214581239611605770.JavaMail.root@zm02.stanford.edu> Sorry for the late notice. From rshyam at stanford.edu Mon Apr 13 19:50:33 2009 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Mon, 13 Apr 2009 19:50:33 -0700 (PDT) Subject: epi2 free at 12 am tonight Message-ID: <1829384274.418001239677433850.JavaMail.root@zm02.stanford.edu> From mmessana at stanford.edu Tue Apr 14 09:34:03 2009 From: mmessana at stanford.edu (Matthew W. Messana) Date: Tue, 14 Apr 2009 09:34:03 -0700 Subject: epi2 reservation released - 4-8pm today Message-ID: <017601c9bd1e$d2d5df30$78819d90$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From bwchui at yahoo.com Fri Apr 24 04:59:08 2009 From: bwchui at yahoo.com (Benjamin Chui) Date: Fri, 24 Apr 2009 04:59:08 -0700 (PDT) Subject: Epi2 available Friday 1100-1400; 1730-2130 Message-ID: <537662.30524.qm@web36507.mail.mud.yahoo.com> My wafers will get done early so won't need Fri afternoon time; and another user also deleted his reservation in the morning. Ben From jrjain at stanford.edu Sat Apr 25 11:18:46 2009 From: jrjain at stanford.edu (Raja Jain) Date: Sat, 25 Apr 2009 11:18:46 -0700 Subject: epi2 Issues Message-ID: <000601c9c5d2$46588460$d3098d20$@edu> Dear Epi2 users, I dislike having to send this email, but it seems some of us need to be retrained. Please do not remove someone else's wafers from the epi2 and put them in dirty cassettes. I had wafers running during the night intended for subsequent clean processing to be done immediately afterwards. The next user removed the wafers before my reservation was complete (by a full hour) and placed them in a dirty cassette. I'm sure this wasn't a case of intentional disregard, but these wafers are now unusable and time was wasted. Let's try to use a little common sense and courtesy with each other. Thanks, Raja -------------- next part -------------- An HTML attachment was scrubbed... URL: From yoonjin at stanford.edu Mon Apr 27 14:49:54 2009 From: yoonjin at stanford.edu (Yoonjin Won) Date: Mon, 27 Apr 2009 14:49:54 -0700 Subject: canceled 12:30-4 pm tomorrow Message-ID: From jrjain at stanford.edu Tue Apr 28 18:35:35 2009 From: jrjain at stanford.edu (Raja Jain) Date: Tue, 28 Apr 2009 18:35:35 -0700 Subject: epi2 free at 7:30pm Message-ID: <011b01c9c86a$cbd03bc0$6370b340$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From angiel at stanford.edu Tue Apr 28 18:51:23 2009 From: angiel at stanford.edu (Angie Lin) Date: Tue, 28 Apr 2009 18:51:23 -0700 Subject: epi2 free at 7:30pm In-Reply-To: <011b01c9c86a$cbd03bc0$6370b340$@edu> References: <011b01c9c86a$cbd03bc0$6370b340$@edu> Message-ID: thanks, I'll continue to use until 8:30pm. On Apr 28, 2009, at 6:35 PM, Raja Jain wrote: > -------------- next part -------------- An HTML attachment was scrubbed... URL: From masaharu at stanford.edu Tue Apr 28 22:12:25 2009 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Tue, 28 Apr 2009 22:12:25 -0700 (PDT) Subject: epi2 free at 7:30pm In-Reply-To: <011b01c9c86a$cbd03bc0$6370b340$@edu> Message-ID: <236433053.562931240981945378.JavaMail.root@zm07.stanford.edu> Thank you! I will use epi2 until 12:30. Masaharu Masaharu Kobayashi Ph.D candidate Department of Electrical Engineering Stanford Unversity TEL:650-521-4260 E-mail:masaharu at stanford.edu ----- Original Message ----- From: Raja Jain To: epi2 at snf.stanford.edu Sent: Tue, 28 Apr 2009 18:35:35 -0700 (PDT) Subject: epi2 free at 7:30pm From rshyam at stanford.edu Wed Apr 29 15:35:46 2009 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Wed, 29 Apr 2009 15:35:46 -0700 (PDT) Subject: epi2 free at 6 pm tonight Message-ID: <987548312.950311241044546310.JavaMail.root@zm02.stanford.edu> From jrjain at stanford.edu Wed Apr 29 15:41:04 2009 From: jrjain at stanford.edu (Raja Jain) Date: Wed, 29 Apr 2009 15:41:04 -0700 Subject: epi2 free at 6 pm tonight In-Reply-To: <987548312.950311241044546310.JavaMail.root@zm02.stanford.edu> References: <987548312.950311241044546310.JavaMail.root@zm02.stanford.edu> Message-ID: <00a101c9c91b$94b04610$be10d230$@edu> Taken. Thanks. From: Shyam Raghunathan [mailto:rshyam at stanford.edu] Sent: Wednesday, April 29, 2009 3:36 PM To: epi2 at snf.stanford.edu Subject: epi2 free at 6 pm tonight -------------- next part -------------- An HTML attachment was scrubbed... URL: From gunjim at stanford.edu Thu Apr 30 12:56:34 2009 From: gunjim at stanford.edu (Marika Gunji) Date: Thu, 30 Apr 2009 12:56:34 -0700 (PDT) Subject: Epi2 reservation released from 3PM to 6PM Message-ID: <67854767.1137581241121394191.JavaMail.root@zm03.stanford.edu> Sorry for the short notice. -Marika