Epi2 down/ low dome pressue

maurice stevens maurice at stanford.edu
Fri Apr 3 16:32:55 PDT 2009

The system has shut itself down and is giving two errors...one for high 
pressure and one for low dome pressure. 

Elmer has contacted AMAT FS with the error codes.

Sean may be in to look at the system (it is not unusual for Sean to come 
at night or on the weekends so keep your finger crossed).

*Process update:*
Silicon wafers are looking good.  Andrew ran Si wafers and wafers with 
oxides and both gave him result that were similar to what he got before 
the major maint was done.

I am still see haze and particles on the Ge wafers (using SLGE-DOP2 recipe).

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

More information about the epi2 mailing list