Arsine/Phosphine flows

Maurice M Stevens maurice at stanford.edu
Tue Apr 7 20:50:25 PDT 2009


We have had a request to resize the Arsine/Phosphine MFC.  We would like to gather some info to help make a decision.

Please answer the following question and send it back to me.

Do you use Arsine?

If so, what flow?

What is your target doping?

Are you getting you target?



Do you use Phosphine?

If so, what flow?

What is your target doping?

Are you getting you target?






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