EPI 2 Shut down

Szu-Lin Cheng slcheng at stanford.edu
Wed Aug 12 23:14:40 PDT 2009


Rotation Stepper fail in Chamber A.

Unable to home it also.

 

Szulin

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/epi2/attachments/20090812/381649d5/attachment.html>


More information about the epi2 mailing list