From maurice at stanford.edu Thu Jul 9 10:56:17 2009 From: maurice at stanford.edu (Maurice Stevens) Date: Thu, 09 Jul 2009 10:56:17 -0700 Subject: 20 KW temp test] Message-ID: <4A562F41.3040300@stanford.edu> FYI -------- Original Message -------- Subject: Comment epi2 SNF 2009-07-09 10:54:47: 20 KW temp test Date: Thu, 9 Jul 2009 10:54:48 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Ran AAA_20KW_ TEST Read upper and lower temps at 230 sec into step 2 4/22/09 upper=885 lower=885 (Right after AMAT did temp qual on clean system) - 7/09/09 upper=879 lower=885 (AAA_mega etch done before test. Users may want to increase there deposition temperatures slightly if their recipes are temerature sensitive.) -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Jul 9 17:53:07 2009 From: maurice at stanford.edu (maurice stevens) Date: Thu, 09 Jul 2009 17:53:07 -0700 Subject: Epi2 up Message-ID: <4A5690F3.9010403@stanford.edu> We increased the coat time in the Ge etch/coat recipe then ran 7 wafers. All were haze free in normal light. We are still seeing the swirl of particles (partilces or defects??). Szu-Lin looked at the wafers and thought the wafers look like what we were getting a few months ago (before the haze was an issue). - We also did a 20KW temp test (see coral comment) and found that the system is running about 6 degrees cooler that it did in April at this power. Users may want to adjust their processes. Epi processes drift over time. Don't expect recipes to give previous results without adjustments. - -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri Jul 17 09:30:47 2009 From: maurice at stanford.edu (maurice stevens) Date: Fri, 17 Jul 2009 09:30:47 -0700 Subject: [Fwd: Comment epi2 SNF 2009-07-17 00:19:05: wafer looks good] Message-ID: <4A60A737.5010302@stanford.edu> Yiwen Rong reported the following on coral (thank you for the communication): -------- Original Message -------- Subject: Comment epi2 SNF 2009-07-17 00:19:05: wafer looks good Date: Fri, 17 Jul 2009 00:19:05 -0700 From: ryw at snf.stanford.edu To: epi2-pcs at snf.stanford.edu grew two samples roughly 1.5um each, backside looks great, almost no haze and minimum number of particles(3-4 visible under green light each wafer) -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From slcheng at stanford.edu Sat Jul 18 16:10:49 2009 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Sat, 18 Jul 2009 16:10:49 -0700 Subject: EPI 2 free from now Message-ID: <000101ca07fc$fd816870$f8843950$@edu> Finished early -------------- next part -------------- An HTML attachment was scrubbed... URL: From rshyam at stanford.edu Thu Jul 23 01:01:01 2009 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Thu, 23 Jul 2009 01:01:01 -0700 (PDT) Subject: epi2 free now Message-ID: <526669458.10984611248336061955.JavaMail.root@zm02.stanford.edu> sorry for the late notice From jrjain at stanford.edu Thu Jul 23 12:04:05 2009 From: jrjain at stanford.edu (Raja Jain) Date: Thu, 23 Jul 2009 12:04:05 -0700 Subject: epi2 free at 2pm Message-ID: <012301ca0bc8$59e38c50$0daaa4f0$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From gthareja at stanford.edu Fri Jul 24 23:01:24 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Fri, 24 Jul 2009 23:01:24 -0700 (PDT) Subject: epi2 free tomorrow. Message-ID: <1904671439.2399221248501684283.JavaMail.root@zm06.stanford.edu>