20 KW temp test]

Maurice Stevens maurice at stanford.edu
Thu Jul 9 10:56:17 PDT 2009


-------- Original Message --------
Subject: 	Comment epi2 SNF 2009-07-09 10:54:47: 20 KW temp test
Date: 	Thu, 9 Jul 2009 10:54:48 -0700
From: 	maurice at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu

Read upper and lower temps at 230 sec into step 2
4/22/09 upper=885   lower=885
 (Right after AMAT did temp qual on clean system)
7/09/09 upper=879   lower=885  
(AAA_mega etch done before  test. 
Users may want to increase there deposition temperatures slightly if their recipes are temerature sensitive.)

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