From slcheng at stanford.edu Tue Jun 2 21:54:09 2009 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Tue, 2 Jun 2009 21:54:09 -0700 Subject: EPI 2 free from now Message-ID: <001901c9e407$54eaae60$fec00b20$@edu> Finished early -------------- next part -------------- An HTML attachment was scrubbed... URL: From angiel at stanford.edu Wed Jun 3 16:00:00 2009 From: angiel at stanford.edu (Angie Lin) Date: Wed, 3 Jun 2009 16:00:00 -0700 Subject: epi2 Fri 8-10:30am released Message-ID: don't need the time anymore. From rshyam at stanford.edu Wed Jun 3 22:21:48 2009 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Wed, 3 Jun 2009 22:21:48 -0700 (PDT) Subject: epi2 free at 1 am tonight Message-ID: <59620812.3576611244092908909.JavaMail.root@zm02.stanford.edu> From slcheng at stanford.edu Thu Jun 4 22:45:13 2009 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Thu, 4 Jun 2009 22:45:13 -0700 Subject: EPI 2 free from now Message-ID: <000001c9e5a0$cc0d94e0$6428bea0$@edu> Finished early -------------- next part -------------- An HTML attachment was scrubbed... URL: From till.weidner at live.de Mon Jun 8 09:34:08 2009 From: till.weidner at live.de (Till Weidner) Date: Mon, 8 Jun 2009 09:34:08 -0700 Subject: epi2 free today 10:30 am - 2:30 pm Message-ID: Apologize for late notice. Wafers not ready. _________________________________________________________________ Hotmail? has ever-growing storage! Don?t worry about storage limits. http://windowslive.com/Tutorial/Hotmail/Storage?ocid=TXT_TAGLM_WL_HM_Tutorial_Storage_062009 -------------- next part -------------- An HTML attachment was scrubbed... URL: From slcheng at stanford.edu Sun Jun 14 10:14:14 2009 From: slcheng at stanford.edu (Szu-Lin Cheng) Date: Sun, 14 Jun 2009 10:14:14 -0700 Subject: EPI 2 free from 1pm to 9pm Message-ID: <011701c9ed13$8b67b180$a2371480$@edu> Samples not ready. Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Jun 15 10:00:25 2009 From: maurice at stanford.edu (maurice stevens) Date: Mon, 15 Jun 2009 10:00:25 -0700 Subject: Epi2 Pressure Setpoint Faults/Throttle valve on order Message-ID: <4A367E29.7070706@stanford.edu> coral update -------- Original Message -------- Subject: Comment epi2 SNF 2009-06-15 09:56:02: Throttle valve on order Date: Mon, 15 Jun 2009 09:56:03 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Throttle valve ordered a week and a half ago...no delivery date yet. - We will continue to experience pressure set point problems until it is replaced. - Pressure problem occurs during etch program when system is running hi pressure (needed to HCl clean the chamber). - Some user may choose to wait until the valve is repaired before running multiple wafers over night or stay around to reset system if there is a pressure fault. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From till.weidner at live.de Tue Jun 16 10:58:00 2009 From: till.weidner at live.de (Till Weidner) Date: Tue, 16 Jun 2009 10:58:00 -0700 Subject: epi2 free from 11 am to 1 pm Message-ID: Finished earlier. _________________________________________________________________ Lauren found her dream laptop. Find the PC that?s right for you. http://www.microsoft.com/windows/choosepc/?ocid=ftp_val_wl_290 -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Jun 19 17:00:15 2009 From: maurice at stanford.edu (maurice stevens) Date: Fri, 19 Jun 2009 17:00:15 -0700 Subject: please report any problems on coral Message-ID: <4A3C268F.1000308@stanford.edu> I have have several users ask that I send out an email asking every to report problems (haze, particles, machine issues...) on coral. Also, fill in the log sheets and write comments on the condition of your wafers (good, bad or whatever). Some Ge users have seen haze on their wafers. Is everyone seeing haze? How about particles? If you don't share information, we don't know if we have process or machine issues. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From gthareja at stanford.edu Fri Jun 19 17:40:46 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Fri, 19 Jun 2009 17:40:46 -0700 (PDT) Subject: epi2 free tonight. Message-ID: <930228194.4622001245458446737.JavaMail.root@zm06.stanford.edu> From rshyam at stanford.edu Fri Jun 26 21:20:23 2009 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Fri, 26 Jun 2009 21:20:23 -0700 (PDT) Subject: epi2 free at 12 am Message-ID: <704837850.7148911246076423650.JavaMail.root@zm02.stanford.edu> From maurice at stanford.edu Mon Jun 29 15:45:42 2009 From: maurice at stanford.edu (Maurice Stevens) Date: Mon, 29 Jun 2009 15:45:42 -0700 Subject: Wafer not centered /corrected Message-ID: <4A494416.3060207@stanford.edu> We found wafers not dropping in the center of susceptor. This will cause wafer temperature to not be uniform and could cause haze for sensitive processes (Ge, SiGe, thin Si). Wafer drop has been adjusted and is now centered for both loadlocks. We are running three thick Ge depositions to check for haze. Update to follow. -m -------- Original Message -------- Subject: Re: Shutdown epi2 SNF 2009-06-29 12:36:07: Wafer not centered on susceptor Date: Mon, 29 Jun 2009 15:14:05 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Added 100 counts to the wafer extension into the chamber. Maurice is now checking the process.