From maurice at stanford.edu  Fri May  1 15:05:51 2009
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 01 May 2009 15:05:51 -0700
Subject: Leave EPI2 in Hot idle over the weekend
Message-ID: <49FB723F.2090902@stanford.edu>

Because we are still having  water flow issues when going from cold to 
hot idle:
Please leave the system in Hot idle (not inert idle). 

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From jrjain at stanford.edu  Sat May  2 11:36:02 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Sat, 2 May 2009 11:36:02 -0700
Subject: epi2 reservation removed
Message-ID: <001501c9cb54$d92b6140$8b8223c0$@edu>

Free until 8:30pm

 

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From ginel at stanford.edu  Sat May  2 20:18:17 2009
From: ginel at stanford.edu (Ginel Corina Hill)
Date: Sat, 2 May 2009 20:18:17 -0700 (PDT)
Subject: Fwd: epi2 not working
In-Reply-To: <61471005.1371901241320660025.JavaMail.root@zm06.stanford.edu>
Message-ID: <1025221976.1372001241320697419.JavaMail.root@zm06.stanford.edu>




Machine was left in inert idle when I arrived and failed to go into hot idle...  

-ginel
 
----- Original Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Friday, May 1, 2009 3:05:51 PM GMT -08:00 US/Canada Pacific
Subject: Leave EPI2 in Hot idle over the weekend

Because we are still having  water flow issues when going from cold to 
hot idle:
Please leave the system in Hot idle (not inert idle). 

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From masaharu at stanford.edu  Sat May  2 20:22:58 2009
From: masaharu at stanford.edu (Masaharu Kobayashi)
Date: Sat, 2 May 2009 20:22:58 -0700 (PDT)
Subject: epi2 not working
In-Reply-To: <1025221976.1372001241320697419.JavaMail.root@zm06.stanford.edu>
Message-ID: <56729464.1231941241320978169.JavaMail.root@zm07.stanford.edu>

Hi Ginel,

According to the log, I was the last user before you.

I surely put the system in "hot idle" today after I finished.

Would the system automatically go to inert idle from hot idle?
I know that the system automatically go to inert from "cold idle" after a while.
Or somebody else may bring the sytem inert idle.

Thanks,

Masaharu

Masaharu Kobayashi
Ph.D candidate
Department of Electrical Engineering
Stanford Unversity
TEL:650-521-4260
E-mail:masaharu at stanford.edu

----- ??????? -----
From: "Ginel Corina Hill" <ginel at stanford.edu>
To: epi2 at snf.stanford.edu
????: 2009?5?2?, ??? ?? 8:18:17 GMT-08:00??/?????????
??: Fwd: epi2 not working




Machine was left in inert idle when I arrived and failed to go into hot idle...  

-ginel
 
----- Original Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Friday, May 1, 2009 3:05:51 PM GMT -08:00 US/Canada Pacific
Subject: Leave EPI2 in Hot idle over the weekend

Because we are still having  water flow issues when going from cold to 
hot idle:
Please leave the system in Hot idle (not inert idle). 

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From ginel at stanford.edu  Sat May  2 20:42:32 2009
From: ginel at stanford.edu (Ginel Corina Hill)
Date: Sat, 2 May 2009 20:42:32 -0700 (PDT)
Subject: epi2 not working
In-Reply-To: <732567969.1373581241322009780.JavaMail.root@zm06.stanford.edu>
Message-ID: <35050018.1373741241322152021.JavaMail.root@zm06.stanford.edu>



That is an excellent question for the staff - maybe the machine puts itself into inert idle after a certain amount of inactivity.  Either way, I couldn't get it to work so Sunday users may be out of luck until in gets some maintenance.

Ginel

----- Original Message -----
From: "Masaharu Kobayashi" <masaharu at stanford.edu>
To: "Ginel Corina Hill" <ginel at stanford.edu>
Cc: epi2 at snf.stanford.edu
Sent: Saturday, May 2, 2009 8:22:58 PM GMT -08:00 US/Canada Pacific
Subject: Re: epi2 not working

Hi Ginel,

According to the log, I was the last user before you.

I surely put the system in "hot idle" today after I finished.

Would the system automatically go to inert idle from hot idle?
I know that the system automatically go to inert from "cold idle" after a while.
Or somebody else may bring the sytem inert idle.

Thanks,

Masaharu

Masaharu Kobayashi
Ph.D candidate
Department of Electrical Engineering
Stanford Unversity
TEL:650-521-4260
E-mail:masaharu at stanford.edu

----- ??????? -----
From: "Ginel Corina Hill" <ginel at stanford.edu>
To: epi2 at snf.stanford.edu
????: 2009?5?2?, ??? ?? 8:18:17 GMT-08:00??/?????????
??: Fwd: epi2 not working




Machine was left in inert idle when I arrived and failed to go into hot idle...  

-ginel
 
----- Original Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Friday, May 1, 2009 3:05:51 PM GMT -08:00 US/Canada Pacific
Subject: Leave EPI2 in Hot idle over the weekend

Because we are still having  water flow issues when going from cold to 
hot idle:
Please leave the system in Hot idle (not inert idle). 

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From angiel at stanford.edu  Tue May  5 07:08:18 2009
From: angiel at stanford.edu (Angie Lin)
Date: Tue, 5 May 2009 07:08:18 -0700
Subject: note to epi2 users
Message-ID: <3C761C89-0206-4B12-9323-E16C4884484D@stanford.edu>

I'm canceling my reservation this morning from 7-10am because the  
previous users' wafers are still running and looks like it will  
continue to run well into my reservation time.

I didn't think something like this is necessary to say but apparently  
it is.  Please be considerate of other users and respect their  
reservation times.  This is particularly important for off-hour times  
when no one is around or can be contacted.

Angie


From hweiyin at stanford.edu  Tue May  5 11:19:12 2009
From: hweiyin at stanford.edu (Serene Koh)
Date: Tue, 5 May 2009 11:19:12 -0700 (PDT)
Subject: reservation cancelled this afternoon 2pm to 10pm
Message-ID: <Pine.LNX.4.44.0905051118180.12774-100000@hedge12.stanford.edu>

Sorry for the late notice.  Unable to get wafers ready for epi process.



From rik9 at stanford.edu  Sat May  9 09:14:24 2009
From: rik9 at stanford.edu (Rishi Kant)
Date: Sat, 9 May 2009 09:14:24 -0700 (PDT)
Subject: Epi2 reservation removed 10 am - 12 pm
Message-ID: <1426782373.2714681241885664554.JavaMail.root@zm06.stanford.edu>

Wafers were not ready in time. Sorry for late notice. 


From gthareja at stanford.edu  Sun May 10 08:08:04 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Sun, 10 May 2009 08:08:04 -0700 (PDT)
Subject: epi2 free now.
Message-ID: <1227866980.2803741241968084291.JavaMail.root@zm06.stanford.edu>



From masaharu at stanford.edu  Tue May 12 05:04:33 2009
From: masaharu at stanford.edu (Masaharu Kobayashi)
Date: Tue, 12 May 2009 05:04:33 -0700 (PDT)
Subject: reservation release
Message-ID: <1309152403.2951251242129873621.JavaMail.root@zm07.stanford.edu>

Sorry for the short notice, because of process delay by ASML down

Masaharu Kobayashi
Ph.D candidate
Department of Electrical Engineering
Stanford Unversity
TEL:650-521-4260
E-mail:masaharu at stanford.edu


From ginel at stanford.edu  Tue May 12 10:30:38 2009
From: ginel at stanford.edu (Ginel Corina Hill)
Date: Tue, 12 May 2009 10:30:38 -0700 (PDT)
Subject: free until 5pm
Message-ID: <578722349.3271441242149438919.JavaMail.root@zm06.stanford.edu>

wafers not ready b/c asml has been down.  


From angiel at stanford.edu  Tue May 12 10:45:00 2009
From: angiel at stanford.edu (Angie Lin)
Date: Tue, 12 May 2009 10:45:00 -0700
Subject: epi free tomorrow 2-5:30pm
Message-ID: <870A9458-1A95-41F5-9F91-5B2C2B29DF86@stanford.edu>



From maurice at stanford.edu  Tue May 12 16:04:59 2009
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 12 May 2009 16:04:59 -0700
Subject: epi2 free til 8:30pm
Message-ID: <4A0A009B.6090403@stanford.edu>

enjoy

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From jrjain at stanford.edu  Wed May 13 14:03:30 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Wed, 13 May 2009 14:03:30 -0700
Subject: epi2 free 5:30-10pm
Message-ID: <029101c9d40e$4512f230$cf38d690$@edu>

 

 

Jinendra Raja Jain

PhD Candidate, Department of Electrical Engineering

Stanford University

Allen Center for Integrated Systems

420 Via Palou

Stanford, CA 94305

(650) 248-0770

 

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From ginel at stanford.edu  Wed May 13 19:12:56 2009
From: ginel at stanford.edu (Ginel Corina Hill)
Date: Wed, 13 May 2009 19:12:56 -0700 (PDT)
Subject: epi2 free tomorrow 1-5pm
Message-ID: <548848990.3628221242267176382.JavaMail.root@zm06.stanford.edu>

finished today


From maurice at stanford.edu  Fri May 15 16:34:35 2009
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 15 May 2009 16:34:35 -0700
Subject: Comment epi2 SNF 2009-05-15 15:01:15: Update
Message-ID: <4A0DFC0B.3000009@stanford.edu>

Epi2 will be down for the weekend.

See Elmer's note below:

-------- Original Message --------
Subject: 	Comment epi2 SNF 2009-05-15 15:01:15: Update
Date: 	Fri, 15 May 2009 15:01:16 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Unable to clear the water flow fault.  Cooling water lines might be clogged up with sediment.  Need further troubleshooting



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Tue May 19 15:33:28 2009
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 19 May 2009 15:33:28 -0700
Subject: [Fwd: Comment epi2 SNF 2009-05-19 15:03:35: Update]
Message-ID: <4A1333B8.3000602@stanford.edu>

 From Elmer:


Mike cleaned a portion of the foreline and rebuilt the throttle valve.
Will install a water flow meter tomorrow and adjust the flow switch.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Wed May 20 17:51:29 2009
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 20 May 2009 17:51:29 -0700
Subject: Epi2 is up!
Message-ID: <4A14A591.1010700@stanford.edu>

Mike cleaned a portion of the foreline and rebuilt the throttle valve.  
We ran the problem recipes several times and the pressure was stable.

Elmer found a magnet on the water flow meter out of place.  It seems to 
be working now...report ant new water flow issues as problems on coral.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From ginel at stanford.edu  Thu May 21 00:54:15 2009
From: ginel at stanford.edu (Ginel Corina Hill)
Date: Thu, 21 May 2009 00:54:15 -0700 (PDT)
Subject: epi2 free tomorrow am 8-11
In-Reply-To: <279445203.4970981242892047264.JavaMail.root@zm06.stanford.edu>
Message-ID: <1455909313.4971671242892455311.JavaMail.root@zm06.stanford.edu>

sorry for late notice - wafers ugly :(


From jasonlin at stanford.edu  Thu May 21 20:15:13 2009
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Thu, 21 May 2009 20:15:13 -0700
Subject: Reservation Released Tomorrow 10am - 2pm
Message-ID: <AE4B5609-FF6E-4D3D-A14F-02FF88F85220@stanford.edu>



From ginel at stanford.edu  Thu May 21 22:28:27 2009
From: ginel at stanford.edu (Ginel Corina Hill)
Date: Thu, 21 May 2009 22:28:27 -0700 (PDT)
Subject: chamber has not been cleaned.
In-Reply-To: <1584966507.5168551242970017567.JavaMail.root@zm06.stanford.edu>
Message-ID: <71306225.5168761242970107696.JavaMail.root@zm06.stanford.edu>

water flow faults and pressure stabilization faults during chamber clean.  was not able to run cleaning process.


From rik9 at stanford.edu  Tue May 26 12:20:16 2009
From: rik9 at stanford.edu (Rishi Kant)
Date: Tue, 26 May 2009 12:20:16 -0700 (PDT)
Subject: Free from 2-4 pm today
Message-ID: <1030828326.104241243365616913.JavaMail.root@zm06.stanford.edu>



From ginel at stanford.edu  Tue May 26 13:46:16 2009
From: ginel at stanford.edu (Ginel Corina Hill)
Date: Tue, 26 May 2009 13:46:16 -0700 (PDT)
Subject: wafers left in load lock A?
Message-ID: <460486806.127551243370776285.JavaMail.root@zm06.stanford.edu>

If they are yours, please claim them!  (Who knows where they will end up if someone decides to pull them out!)


From ginel at stanford.edu  Tue May 26 21:07:23 2009
From: ginel at stanford.edu (Ginel Corina Hill)
Date: Tue, 26 May 2009 21:07:23 -0700 (PDT)
Subject: reservation removed tomorrow am and other days
Message-ID: <872921139.232681243397243111.JavaMail.root@zm06.stanford.edu>

finished early!


From rshyam at stanford.edu  Thu May 28 02:14:43 2009
From: rshyam at stanford.edu (Shyam Raghunathan)
Date: Thu, 28 May 2009 02:14:43 -0700 (PDT)
Subject: epi2 free now
Message-ID: <148205157.2142161243502083952.JavaMail.root@zm02.stanford.edu>

sorry for the late notice


From maurice at stanford.edu  Thu May 28 16:54:02 2009
From: maurice at stanford.edu (maurice stevens)
Date: Thu, 28 May 2009 16:54:02 -0700
Subject: free friday 1400 to 1530Epi2 
Message-ID: <4A1F241A.50202@stanford.edu>

Finished project early

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From rik9 at stanford.edu  Fri May 29 15:23:41 2009
From: rik9 at stanford.edu (Rishi Kant)
Date: Fri, 29 May 2009 15:23:41 -0700 (PDT)
Subject: Epi2 reservation released 7 pm -9 pm
Message-ID: <686445689.933141243635821831.JavaMail.root@zm06.stanford.edu>



From jrjain at stanford.edu  Sun May 31 08:56:45 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Sun, 31 May 2009 08:56:45 -0700
Subject: epi2 free at 10am
Message-ID: <001101c9e208$66199c60$324cd520$@edu>

Apologies for the late notice

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