Leave EPI2 in Hot idle over the weekend

maurice stevens maurice at stanford.edu
Fri May 1 15:05:51 PDT 2009

Because we are still having  water flow issues when going from cold to 
hot idle:
Please leave the system in Hot idle (not inert idle). 


maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

More information about the epi2 mailing list