Epi2 is up!

maurice stevens maurice at stanford.edu
Wed May 20 17:51:29 PDT 2009


Mike cleaned a portion of the foreline and rebuilt the throttle valve.  
We ran the problem recipes several times and the pressure was stable.

Elmer found a magnet on the water flow meter out of place.  It seems to 
be working now...report ant new water flow issues as problems on coral.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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