Epi2 is up!

maurice stevens maurice at stanford.edu
Wed May 20 17:51:29 PDT 2009

Mike cleaned a portion of the foreline and rebuilt the throttle valve.  
We ran the problem recipes several times and the pressure was stable.

Elmer found a magnet on the water flow meter out of place.  It seems to 
be working now...report ant new water flow issues as problems on coral.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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