From ryw at stanford.edu  Thu Oct  8 15:00:26 2009
From: ryw at stanford.edu (Yiwen Rong)
Date: Thu, 8 Oct 2009 15:00:26 -0700 (PDT)
Subject: wafers in LLA
Message-ID: <1474785124.2761271255039226883.JavaMail.root@zm03.stanford.edu>

Hi Epi2 users:
someone left 5 wafers in LLA, just got them out and put them in diffusion cassette on the table.

Yiwen


From jrjain at stanford.edu  Thu Oct  8 19:59:03 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Thu, 8 Oct 2009 19:59:03 -0700
Subject: epi2 free at 11pm
Message-ID: <002101ca488c$7671ef00$6355cd00$@edu>

 

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From mtang at stanford.edu  Thu Oct 15 16:37:01 2009
From: mtang at stanford.edu (Mary Tang)
Date: Thu, 15 Oct 2009 16:37:01 -0700
Subject: Systems unavailable next week
Message-ID: <4AD7B21D.8070702@stanford.edu>

Dear epi2/tylannitride/thermconitride1 users:


We are being required to reduce the amount of dichlorosilane in 
inventory.  In order to ensure we always have an adequate supply despite 
long lead times, the DCS supply lines on these tools will be tied 
together.  We've reserved these tools for Tuesday through Friday next 
week, with margin for possible problems and requalification (many thanks 
to Gaurav for volunteering to requalify epi2.)  This should be a simple 
modification and don't anticipate problems.  We will keep everyone 
updated on progress.


You SNF Staff


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From jrjain at stanford.edu  Thu Oct 15 21:46:14 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Thu, 15 Oct 2009 21:46:14 -0700
Subject: epi2 free at midnight
Message-ID: <003e01ca4e1b$98853270$c98f9750$@edu>

 

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From gthareja at stanford.edu  Thu Oct 29 23:28:36 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Thu, 29 Oct 2009 23:28:36 -0700 (PDT)
Subject: epi2 free Saturday morning. got an earlier time slot
Message-ID: <1698878955.7540961256884116336.JavaMail.root@zm06.stanford.edu>