From maurice at stanford.edu Thu Apr 1 14:58:15 2010 From: maurice at stanford.edu (Maurice Stevens) Date: Thu, 01 Apr 2010 14:58:15 -0700 Subject: epi 2 ip Message-ID: <4BB516F7.8040003@stanford.edu> -------- Original Message -------- Subject: Re: Comment epi2 SNF 2010-03-31 08:33:25: Update Date: Thu, 1 Apr 2010 14:14:35 -0700 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu We created an etch program to run at 1000c instead of 1190c and extended the etch time. After several etches we saw the active idle temp come back to the normal ~700c reading. We did the 20Kw test and got normal values... which tells us that the coated spot on the lower dome cleared. We ran the Ge etch recipes 7 times to make sure we didn't still have the contactor shutting off issue. And we ran a megaetch to check the silicon etch as well. From jasonlin at stanford.edu Sat Apr 3 18:12:05 2010 From: jasonlin at stanford.edu (J. Jason Lin) Date: Sat, 3 Apr 2010 18:12:05 -0700 Subject: epi2 free tonight midnight - Sunday noon Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Mon Apr 5 13:26:53 2010 From: maurice at stanford.edu (maurice stevens) Date: Mon, 05 Apr 2010 13:26:53 -0700 Subject: Epi2 free Tues from 10-12 noon Message-ID: <4BBA478D.70109@stanford.edu> Rescheduled training -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu Apr 8 11:56:15 2010 From: maurice at stanford.edu (Maurice Stevens) Date: Thu, 08 Apr 2010 11:56:15 -0700 Subject: epi2 gases off Tues/Wed Message-ID: <4BBE26CF.2020506@stanford.edu> We have reserved next Tues and Wed for purging the epi1 gas lines. Since Epi1 and Epi2 share gas lines we will need to turn off the gases to Epi2 during that time. From maurice at stanford.edu Mon Apr 26 15:33:24 2010 From: maurice at stanford.edu (maurice stevens) Date: Mon, 26 Apr 2010 15:33:24 -0700 Subject: Epi2 update Message-ID: <4BD614B4.1020505@stanford.edu> From Elmer: -------- Original Message -------- Subject: Comment epi2 SNF 2010-04-26 15:00:33: Update Date: Mon, 26 Apr 2010 15:00:33 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Defective lamp power supply. Need to replace a bad component. Having a difficult time locating a vendor who has a thyristor module in stock. The manufacturer is Semikron and the part# is SKKT 92/12E. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed Apr 28 10:05:27 2010 From: maurice at stanford.edu (maurice stevens) Date: Wed, 28 Apr 2010 10:05:27 -0700 Subject: Epi2 update 4/28/10 In-Reply-To: <4BD614B4.1020505@stanford.edu> References: <4BD614B4.1020505@stanford.edu> Message-ID: <4BD86AD7.9070105@stanford.edu> Elmer has located another lamp power supply and expect to have it late today or tomorrow. He has also located and ordered the thyristor module. maurice stevens wrote: > From Elmer: > > -------- Original Message -------- > Subject: Comment epi2 SNF 2010-04-26 15:00:33: Update > Date: Mon, 26 Apr 2010 15:00:33 -0700 > From: eenriquez at snf.stanford.edu > To: epi2-pcs at snf.stanford.edu > > > > Defective lamp power supply. Need to replace a bad component. Having > a difficult time locating a vendor who has a thyristor module in > stock. The manufacturer is Semikron and the part# is SKKT 92/12E. > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278