Epi2: Fri reservation released

Ginel Hill ginel at stanford.edu
Wed Aug 4 09:52:19 PDT 2010


wafers finished yesterday...


----- Original Message -----
From: "maurice stevens" <maurice at stanford.edu>
To: epi2 at snf.stanford.edu
Sent: Monday, July 26, 2010 1:59:01 PM
Subject: Epi2: Update scrubber

 From Elmer:

-------- Original Message --------
Subject: 	Comment epi2 SNF 2010-07-26 11:30:51: Update scrubber
Date: 	Mon, 26 Jul 2010 11:30:52 -0700
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Scrubber exhaust output seems to be clogged up.  Need to clean up the scrubber and unclog the exhaust.  Also need to replace all the corroded exhaust lines.  System should be ready by Friday.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




More information about the epi2 mailing list