From maurice at stanford.edu Wed Dec 1 09:26:36 2010 From: maurice at stanford.edu (maurice) Date: Wed, 01 Dec 2010 09:26:36 -0800 Subject: Don't switch the load lock boats Message-ID: <4CF6854C.6050200@stanford.edu> I found that someone had switched the load lock boats from one side to the other. The boats are scribed with and "A" and "B". The robot are is calibrated for each boat to be in the correct load lock. I know some of you will say that the boats look exactly the same is should not make a difference. I really does cause problems (ask any of the recent users about the wafer not on blade problems). Check that the correct boat is in the correct load lock when you are loading you wafers. From maurice at stanford.edu Wed Dec 1 09:48:43 2010 From: maurice at stanford.edu (maurice) Date: Wed, 01 Dec 2010 09:48:43 -0800 Subject: wafer lost?/shut down machine Message-ID: <4CF68A7B.1040108@stanford.edu> If you do not recovery all your wafers from Epi2, shutdown the tool. The tool has no magic way to make your wafers disappear. They still do exist...somewhere in the tool. There are currently three wafers in the process chamber. We will have to open it up, remove the wafers and inspect the chamber quartz for any problems. The system will be down for a least two days. Also, if you load your wafers in, you should be the person unloading the wafers. Don't leave it for the next users unless you have spoken with that user. The machine has occasional (some times frequent if the cassettes are switched)) handling problems. The next users should not have to recover your wafers, figure out if your wafers were run or where you wafer should go. You are also responsible for making sure the chamber is etched at the end of your reservation. If there are problems that you can't recover from make sure you note it on coral (include that you were not able to etch the chamber). From maurice at stanford.edu Fri Dec 3 16:07:36 2010 From: maurice at stanford.edu (maurice) Date: Fri, 03 Dec 2010 16:07:36 -0800 Subject: Fwd: Comment epi2 SNF 2010-12-03 16:00:15: Baking system/testing Monday Message-ID: <4CF98648.3070507@stanford.edu> Ted has epi back together. The susceptor and one lift pin were replaced. Ted also said said that the leak rate is high but is should come down after baking out. It was at atm most of the week so it will need to bake out for a few days before we get haze free depositions. System will be in active idle over the weekend. Narii (Yuel) may run a Ge test on Sunday. I'll run tests on Monday. -m -------- Original Message -------- Subject: Comment epi2 SNF 2010-12-03 16:00:15: Baking system/testing Monday Date: Fri, 3 Dec 2010 16:00:16 -0800 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu The system will sit in active idle over the weekend. I will test on Monday. Yuel (narii) may try a Ge test on Sunday. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Wed Dec 8 18:58:20 2010 From: jasonlin at stanford.edu (J. Jason Lin) Date: Wed, 8 Dec 2010 18:58:20 -0800 Subject: epi2 released tonight 7:30pm Message-ID: Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Thu Dec 9 17:01:12 2010 From: maurice at stanford.edu (maurice stevens) Date: Thu, 09 Dec 2010 17:01:12 -0800 Subject: Epi2 status Message-ID: <4D017BD8.1020704@stanford.edu> The epi has had repeated problems this week with chamber over pressure. The system protects itself for damage by going into isolation. Ted has replaced the pressure control valve (PCV) twice this week and we are still seeing the problem. We will look at the pump tomorrow. The pressure deviation/overpressure always happens during the etch program. So the system is not getting a complete etch. We have shut the system down tonight because if we continue to put deposits on the dome (without etching) we will have to open the system and replace it. We will send an update tomorrow. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri Dec 10 15:04:30 2010 From: maurice at stanford.edu (maurice stevens) Date: Fri, 10 Dec 2010 15:04:30 -0800 Subject: Epi2 up Message-ID: <4D02B1FE.4080002@stanford.edu> from coral: -------- Original Message -------- Subject: Re: Shutdown epi2 SNF 2010-12-09 10:50:45: system over pressure Date: Fri, 10 Dec 2010 14:24:47 -0800 From: maurice at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Replaced PCV. Replaced Chamber A pump. Modified Ge Etch program (lift: lower changed to lift:normal in step 5). - We have run 4 Ge etches without pressure deviation warnings or chamber over pressure. We will continue to monitor system. - User should report any errors they see...even if they can recover from it. -------------- next part -------------- An HTML attachment was scrubbed... URL: