Don't switch the load lock boats

maurice maurice at stanford.edu
Wed Dec 1 09:26:36 PST 2010


I found that someone had switched the load lock boats from one side to 
the other.

The boats are scribed with and "A" and "B".  The robot are is calibrated 
for each boat to be in the correct load lock.

I know some of you will say that the boats look exactly the same is 
should not make a difference.  I really does cause problems (ask any of 
the recent users about the wafer not on blade problems).

Check that the correct boat is in the correct load lock when you are 
loading you wafers.



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