Don't switch the load lock boats
maurice at stanford.edu
Wed Dec 1 09:26:36 PST 2010
I found that someone had switched the load lock boats from one side to
The boats are scribed with and "A" and "B". The robot are is calibrated
for each boat to be in the correct load lock.
I know some of you will say that the boats look exactly the same is
should not make a difference. I really does cause problems (ask any of
the recent users about the wafer not on blade problems).
Check that the correct boat is in the correct load lock when you are
loading you wafers.
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