Fwd: Comment epi2 SNF 2010-12-03 16:00:15: Baking system/testing Monday
maurice at stanford.edu
Fri Dec 3 16:07:36 PST 2010
Ted has epi back together. The susceptor and one lift pin were
replaced. Ted also said said that the leak rate is high but is should
come down after baking out.
It was at atm most of the week so it will need to bake out for a few
days before we get haze free depositions.
System will be in active idle over the weekend. Narii (Yuel) may run a
Ge test on Sunday. I'll run tests on Monday.
-------- Original Message --------
Subject: Comment epi2 SNF 2010-12-03 16:00:15: Baking system/testing
Date: Fri, 3 Dec 2010 16:00:16 -0800
From: maurice at snf.stanford.edu
To: epi2-pcs at snf.stanford.edu
The system will sit in active idle over the weekend. I will test on Monday. Yuel (narii) may try a Ge test on Sunday.
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