Epi2 up

maurice stevens maurice at stanford.edu
Fri Dec 10 15:04:30 PST 2010


from coral:

-------- Original Message --------
Subject: 	Re: Shutdown epi2 SNF 2010-12-09 10:50:45: system over pressure
Date: 	Fri, 10 Dec 2010 14:24:47 -0800
From: 	maurice at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Replaced PCV.  Replaced Chamber A pump.  Modified Ge Etch program (lift: lower changed to lift:normal in step 5).
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We have run 4 Ge etches without  pressure deviation warnings or chamber over pressure.  We will continue to monitor system.
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User should report any errors they see...even if they can recover from it.


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