[Fwd: Re: Shutdown epi2 SNF 2010-01-25 08:08:05: HCl cylinder change]

maurice stevens maurice at stanford.edu
Wed Feb 3 10:53:37 PST 2010


Elemer has put Epi2 up.

We have run the Ge etch and the Mega etch twice. 

-------- Original Message --------
Subject: 	Re: Shutdown epi2 SNF 2010-01-25 08:08:05: HCl cylinder change
Date: 	Wed, 3 Feb 2010 10:01:26 -0800
From: 	eenriquez at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



Changed HCl cylinder and completed repair of leaky HCl line.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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