Dope has a light coating/ no Ge dep

Maurice Stevens maurice at
Thu Feb 18 15:13:27 PST 2010

The dome has a light coating.  Don't use for Ge or SiGe deposition until 
we resolve this coating issue.

We will try doing some long etches tomorrow and reinspect the dome. If 
it does not clean up we will have to open the system and clean the dome.

More information about the epi2 mailing list