As titled. You can find the details from Coral if you also use DOP1. I believe the machine still works fine for depositions not related to Arsenic or Phosphorous doping. Szulin -------------- next part -------------- An HTML attachment was scrubbed... URL: <http://snf.stanford.edu/pipermail/epi2/attachments/20100114/f5b6cbc7/attachment.html>