EPI 2 free due to flow deviaiton in DOP1

Szu-Lin Cheng slcheng at stanford.edu
Thu Jan 14 17:23:56 PST 2010


As titled.

You can find the details from Coral if you also use DOP1.

I believe the machine still works fine for depositions not related to
Arsenic or Phosphorous doping. 

 

Szulin

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