AMAT FS resolves issues

maurice stevens maurice at
Wed Jan 20 15:18:16 PST 2010

Epi2 is back up

mixed dopant air valve replaced
both mixed dopant back pressure valves adjusted (should be 25 psi while 
flowing gas)
water flow sensor adjusted

ran dopant flow recipe several times at different flows to check valves 
and back pressure setting
cycled from cold to hot idle several times to check water flow

maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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