AMAT FS resolves issues

maurice stevens maurice at stanford.edu
Wed Jan 20 15:18:16 PST 2010


Epi2 is back up

AMAT FS:
mixed dopant air valve replaced
both mixed dopant back pressure valves adjusted (should be 25 psi while 
flowing gas)
water flow sensor adjusted

SNF:
ran dopant flow recipe several times at different flows to check valves 
and back pressure setting
cycled from cold to hot idle several times to check water flow

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




More information about the epi2 mailing list