New!! Dopant Purge Procedure

maurice stevens maurice at
Wed Jan 20 15:36:39 PST 2010

Hi All,

We (Ted Kamins, Shen, Yiwen, Serene and I) have worked on a new dopant 
purge document that should make the purging more effective, reproducible 
and reduce our gas consumption.

The document is on the table in front of Epi2 and will be on the wiki 
soon.  Please use this new procedure and let us know if you have any 


maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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